Magnetic field influence on the discharge parameters of two-stage gas-metal plasma source
The discharge parameters and vacuum regimes of the two-stage gas-metal plasma source are presented for three configurations of magnetic field. Distributions of deposited flows, current and voltage characteristics of the discharge, current characteristics for reflective electrodes and target are pr...
Saved in:
| Published in: | Вопросы атомной науки и техники |
|---|---|
| Date: | 2016 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
|
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/115449 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Magnetic field influence on the discharge parameters of two-stage gas-metal plasma source / S.V. Shariy, V.B. Yuferov, M.O. Shvets, V.I. Tkachov, V.V. Katrechko // Вопросы атомной науки и техники. — 2016. — № 6. — С. 191-194. — Бібліогр.: 4 назв. — англ. |