Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method

• Published in: Вопросы атомной науки и техники
• Date: 2016
• Main Authors: Vasyliev, V.V., Luchaninov, A.A., Reshetnyak, E.N., Strel’nitskij, V.E., Lorentz, B., Reichert, S., Zavaleyev, V., Walkowicz, J., Sawczak, M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/115454
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Structure and properties of the (Cr, Al)N coatings deposited by PIII&D method / V.V. Vasyliev, A.A. Luchaninov, E.N. Reshetnyak, V.E. Strel’nitskij, B. Lorentz,S. Reichert, V. Zavaleyev, J. Walkowicz, M. Sawczak // Вопросы атомной науки и техники. — 2016. — № 6. — С. 244-247. — Бібліогр.: 9 назв. — англ.

Cr-Al-N coatings deposited from the vacuum-arc plasma source with rectilinear macroparticle filter were investigated. Influence of the amplitude of pulsed substrate bias potential in the range of 0…2500 V on the structure and mechanical properties of the coatings was studied. It is found that in a...