Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering

• Published in: Вопросы атомной науки и техники
• Date: 2016
• Main Authors: Yakovin, S., Zykov, A., Dudin, S., Yefymenko, N.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/115455
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Synthesis of thin-film Ta₂O₅ coatings by reactive magnetron sputtering / S. Yakovin, A. Zykov, S. Dudin, N. Yefymenko // Вопросы атомной науки и техники. — 2016. — № 6. — С. 248-251. — Бібліогр.: 14 назв. — англ.

The investigation results of optimal conditions for synthesis of thin-film tantalum oxide dielectric coatings using
 the cluster multipurpose setup are presented. The set-up consist of DC magnetron, ICP source, and mediumenergy
 ion source. Tantalum oxide was deposited by reactive ma...