Cover Image

The qualitative analysis of the composition of the RF discharge plasma by means of mass-spectrometry

In this paper presents the research results of mass-spectroscopy of the RF discharge plasma in the controlled magnetic fields. The discharge was conducted in the gases containing halogens and mixtures with the oxygen. The evolution of the main plasma components from the oxygen content was investig...

Full description

Saved in:
Bibliographic Details
Published in:Вопросы атомной науки и техники
Date:2016
Main Authors: Hladkovskiy, V.V., Polozov, B.P., Fedorovich, O.A.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2016
Subjects:
Plasma diagnostics
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/115471
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:The qualitative analysis of the composition of the RF discharge plasma by means of mass-spectrometry / V.V. Hladkovskiy, B.P. Polozov, O.A. Fedorovich // Вопросы атомной науки и техники. — 2016. — № 6. — С. 314-316. — Бібліогр.: 5 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine

Similar Items

Similar Items