Formation stages of pulsed discharge in oxygen and carbon tetrafluoride

• Published in: Журнал физики и инженерии поверхности
• Date: 2016
• Main Authors: Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.
• Format: Article
• Language: English
• Published: Науковий фізико-технологічний центр МОН та НАН України 2016
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/117057
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Formation stages of pulsed discharge in oxygen and carbon tetrafluoride / V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov, V.I. Farenik // Журнал физики и инженерии поверхности. — 2016. — Т. 1, № 4. — С. 351-360. — Бібліогр.: 26 назв. — англ.

This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon tetrafluoride pressure values of 0.1 and 1 Torr. Current oscilloscope waveforms o...