The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts
We consider the features of formation of Au-Ti-Pd ohmic contacts to p⁺₋Si. Metallization was made by vacuum thermal sputtering of Pd, Ti and Au films onto the Si substrate heated up to 330 °С. It is shown that the contact resistivity increases with temperature; this is typical of metallic conduct...
Saved in:
| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2010 |
| Main Authors: | , , , , , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
|
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/117698 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts /A.E. Belyaev, N.S. Boltovets, L.M. Kapitanchuk, R.V. Konakova, V.P. Kladko, Ya.Ya. Kudryk, A.V. Kuchuk, O.S. Lytvyn, V.V. Milenin, T.V. Korostinskaya, A.B. Ataubaeva, P.V. Nevolin // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 8-11. — Бібліогр.: 14 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
nasplib_isofts_kiev_ua-123456789-117698 |
|---|---|
| record_format |
dspace |
| spelling |
Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Konakova, R.V. Kladko, V.P. Kudryk, Ya.Ya. Kuchuk, A.V. Lytvyn, O.S. Milenin, V.V. Korostinskaya, T.V. Ataubaeva, A.B. Nevolin, P.V. 2017-05-26T12:07:14Z 2017-05-26T12:07:14Z 2010 The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts /A.E. Belyaev, N.S. Boltovets, L.M. Kapitanchuk, R.V. Konakova, V.P. Kladko, Ya.Ya. Kudryk, A.V. Kuchuk, O.S. Lytvyn, V.V. Milenin, T.V. Korostinskaya, A.B. Ataubaeva, P.V. Nevolin // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 8-11. — Бібліогр.: 14 назв. — англ. 1560-8034 PACS 85.30.De https://nasplib.isofts.kiev.ua/handle/123456789/117698 We consider the features of formation of Au-Ti-Pd ohmic contacts to p⁺₋Si. Metallization was made by vacuum thermal sputtering of Pd, Ti and Au films onto the Si substrate heated up to 330 °С. It is shown that the contact resistivity increases with temperature; this is typical of metallic conductivity. We suggest that the ohmic contact is formed owing to appearance of shunts at Pd deposition on dislocations or other structural defects. The number of shunts per unit area is close to the measured density of structural defects at the metal-Si interface. This work was supported by the Government Goaloriented Scientific and Technical Program “The development and acquisition of microelectronic technologies, organization of serial production of devices and systems with them” 2008-2011. Decree of the Cabinet of Ministers of Ukraine No 1335 from November 21, 2007. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts |
| spellingShingle |
The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Konakova, R.V. Kladko, V.P. Kudryk, Ya.Ya. Kuchuk, A.V. Lytvyn, O.S. Milenin, V.V. Korostinskaya, T.V. Ataubaeva, A.B. Nevolin, P.V. |
| title_short |
The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts |
| title_full |
The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts |
| title_fullStr |
The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts |
| title_full_unstemmed |
The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts |
| title_sort |
features of temperature dependence of contact resistivity of au-ti-pd₂si-p⁺ ₋si ohmic contacts |
| author |
Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Konakova, R.V. Kladko, V.P. Kudryk, Ya.Ya. Kuchuk, A.V. Lytvyn, O.S. Milenin, V.V. Korostinskaya, T.V. Ataubaeva, A.B. Nevolin, P.V. |
| author_facet |
Belyaev, A.E. Boltovets, N.S. Kapitanchuk, L.M. Konakova, R.V. Kladko, V.P. Kudryk, Ya.Ya. Kuchuk, A.V. Lytvyn, O.S. Milenin, V.V. Korostinskaya, T.V. Ataubaeva, A.B. Nevolin, P.V. |
| publishDate |
2010 |
| language |
English |
| container_title |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| format |
Article |
| description |
We consider the features of formation of Au-Ti-Pd ohmic contacts to p⁺₋Si.
Metallization was made by vacuum thermal sputtering of Pd, Ti and Au films onto the Si
substrate heated up to 330 °С. It is shown that the contact resistivity increases with
temperature; this is typical of metallic conductivity. We suggest that the ohmic contact is
formed owing to appearance of shunts at Pd deposition on dislocations or other structural
defects. The number of shunts per unit area is close to the measured density of structural
defects at the metal-Si interface.
|
| issn |
1560-8034 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/117698 |
| citation_txt |
The features of temperature dependence of contact resistivity of Au-Ti-Pd₂Si-p⁺ ₋Si ohmic contacts /A.E. Belyaev, N.S. Boltovets, L.M. Kapitanchuk, R.V. Konakova, V.P. Kladko, Ya.Ya. Kudryk, A.V. Kuchuk, O.S. Lytvyn, V.V. Milenin, T.V. Korostinskaya, A.B. Ataubaeva, P.V. Nevolin // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 8-11. — Бібліогр.: 14 назв. — англ. |
| work_keys_str_mv |
AT belyaevae thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT boltovetsns thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kapitanchuklm thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT konakovarv thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kladkovp thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kudrykyaya thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kuchukav thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT lytvynos thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT mileninvv thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT korostinskayatv thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT ataubaevaab thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT nevolinpv thefeaturesoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT belyaevae featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT boltovetsns featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kapitanchuklm featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT konakovarv featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kladkovp featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kudrykyaya featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT kuchukav featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT lytvynos featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT mileninvv featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT korostinskayatv featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT ataubaevaab featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts AT nevolinpv featuresoftemperaturedependenceofcontactresistivityofautipd2sipsiohmiccontacts |
| first_indexed |
2025-12-01T20:33:57Z |
| last_indexed |
2025-12-01T20:33:57Z |
| _version_ |
1850860917742370816 |