The kinetic of point defect transformation during the annealing process in electron-irradiated silicon

The A-centers (VO) annealing and transformation of precursors to form stable
 СiОi defects during these processes are described. It was found the necessity to take into
 account annihilation of vacancy type defects with the interstitial type mobile defects to
 describe the...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2011
Hauptverfasser: Gaidar, G.P., Dolgolenko, A.P., Litovchenko, P.G.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2011
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/117707
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Zitieren:The kinetic of point defect transformation during the annealing process in electron-irradiated silicon / G.P. Gaidar, A.P. Dolgolenko, P.G. Litovchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 213-221. — Бібліогр.: 32 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Gaidar, G.P.
Dolgolenko, A.P.
Litovchenko, P.G.
author_facet Gaidar, G.P.
Dolgolenko, A.P.
Litovchenko, P.G.
citation_txt The kinetic of point defect transformation during the annealing process in electron-irradiated silicon / G.P. Gaidar, A.P. Dolgolenko, P.G. Litovchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 213-221. — Бібліогр.: 32 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description The A-centers (VO) annealing and transformation of precursors to form stable
 СiОi defects during these processes are described. It was found the necessity to take into
 account annihilation of vacancy type defects with the interstitial type mobile defects to
 describe the annealing of defects. It was shown that the energies of migration for vacancy
 (V) and interstitial carbon atoms Сi that are defined by the degree of their localization in
 silicon lattice at the temperature close to 550 K are equal Emv = 1.1 eV and Emc = 1.16 eV, accordingly.
first_indexed 2025-12-07T13:12:44Z
format Article
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id nasplib_isofts_kiev_ua-123456789-117707
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1560-8034
language English
last_indexed 2025-12-07T13:12:44Z
publishDate 2011
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Gaidar, G.P.
Dolgolenko, A.P.
Litovchenko, P.G.
2017-05-26T12:47:42Z
2017-05-26T12:47:42Z
2011
The kinetic of point defect transformation during the annealing process in electron-irradiated silicon / G.P. Gaidar, A.P. Dolgolenko, P.G. Litovchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 213-221. — Бібліогр.: 32 назв. — англ.
1560-8034
PACS 61.72.Cc, Ji; 61.80.Fe, 61.82.Fk
https://nasplib.isofts.kiev.ua/handle/123456789/117707
The A-centers (VO) annealing and transformation of precursors to form stable
 СiОi defects during these processes are described. It was found the necessity to take into
 account annihilation of vacancy type defects with the interstitial type mobile defects to
 describe the annealing of defects. It was shown that the energies of migration for vacancy
 (V) and interstitial carbon atoms Сi that are defined by the degree of their localization in
 silicon lattice at the temperature close to 550 K are equal Emv = 1.1 eV and Emc = 1.16 eV, accordingly.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
Article
published earlier
spellingShingle The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
Gaidar, G.P.
Dolgolenko, A.P.
Litovchenko, P.G.
title The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
title_full The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
title_fullStr The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
title_full_unstemmed The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
title_short The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
title_sort kinetic of point defect transformation during the annealing process in electron-irradiated silicon
url https://nasplib.isofts.kiev.ua/handle/123456789/117707
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