Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation
The analysis of photo-thermo-acoustic transformation in materials with the
 modified properties of a surface layer has been made in this work. Formation of a photoacoustic
 response in a layered structure of the type “implanted layer + crystalline Si
 substrate” as a result o...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Datum: | 2011 |
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2011
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/117708 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation / R. Burbelo, M. Isaiev, A. Kuzmich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 167-169. — Бібліогр.: 4 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862590816191512576 |
|---|---|
| author | Burbelo, R. Isaiev, M. Kuzmich, A. |
| author_facet | Burbelo, R. Isaiev, M. Kuzmich, A. |
| citation_txt | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation / R. Burbelo, M. Isaiev, A. Kuzmich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 167-169. — Бібліогр.: 4 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | The analysis of photo-thermo-acoustic transformation in materials with the
modified properties of a surface layer has been made in this work. Formation of a photoacoustic
response in a layered structure of the type “implanted layer + crystalline Si
substrate” as a result of its irradiation by one laser pulse with duration of 20 ns is
analyzed.
|
| first_indexed | 2025-11-27T05:42:20Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-117708 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-27T05:42:20Z |
| publishDate | 2011 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Burbelo, R. Isaiev, M. Kuzmich, A. 2017-05-26T12:48:27Z 2017-05-26T12:48:27Z 2011 Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation / R. Burbelo, M. Isaiev, A. Kuzmich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 167-169. — Бібліогр.: 4 назв. — англ. 1560-8034 PACS 78.20.nb, 81.70.Cv https://nasplib.isofts.kiev.ua/handle/123456789/117708 The analysis of photo-thermo-acoustic transformation in materials with the
 modified properties of a surface layer has been made in this work. Formation of a photoacoustic
 response in a layered structure of the type “implanted layer + crystalline Si
 substrate” as a result of its irradiation by one laser pulse with duration of 20 ns is
 analyzed. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation Article published earlier |
| spellingShingle | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation Burbelo, R. Isaiev, M. Kuzmich, A. |
| title | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation |
| title_full | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation |
| title_fullStr | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation |
| title_full_unstemmed | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation |
| title_short | Photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation |
| title_sort | photo-thermo-acoustic analysis of heterogeneous semiconductor structures under pulse laser irradiation |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/117708 |
| work_keys_str_mv | AT burbelor photothermoacousticanalysisofheterogeneoussemiconductorstructuresunderpulselaserirradiation AT isaievm photothermoacousticanalysisofheterogeneoussemiconductorstructuresunderpulselaserirradiation AT kuzmicha photothermoacousticanalysisofheterogeneoussemiconductorstructuresunderpulselaserirradiation |