Min’ko, V., Shepeliavyi, P., Indutnyy, I., & Litvin, O. (2007). Fabrication of silicon grating structures using interference lithography and chalcogenide inorganic photoresist. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago Style (17th ed.) CitationMin’ko, V.I, P.E Shepeliavyi, I.Z Indutnyy, and O.S Litvin. "Fabrication of Silicon Grating Structures Using Interference Lithography and Chalcogenide Inorganic Photoresist." Semiconductor Physics Quantum Electronics & Optoelectronics 2007.
MLA (8th ed.) CitationMin’ko, V.I, et al. "Fabrication of Silicon Grating Structures Using Interference Lithography and Chalcogenide Inorganic Photoresist." Semiconductor Physics Quantum Electronics & Optoelectronics, 2007.
Warning: These citations may not always be 100% accurate.