Min’ko, V., Shepeliavyi, P., Indutnyy, I., & Litvin, O. (2007). Fabrication of silicon grating structures using interference lithography and chalcogenide inorganic photoresist. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Min’ko, V.I, P.E Shepeliavyi, I.Z Indutnyy, und O.S Litvin. "Fabrication of Silicon Grating Structures Using Interference Lithography and Chalcogenide Inorganic Photoresist." Semiconductor Physics Quantum Electronics & Optoelectronics 2007.
MLA-Zitierstil (8. Ausg.)Min’ko, V.I, et al. "Fabrication of Silicon Grating Structures Using Interference Lithography and Chalcogenide Inorganic Photoresist." Semiconductor Physics Quantum Electronics & Optoelectronics, 2007.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.