Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate
The systems “thin Ni film – lithium niobate” and “thin Pd film – lithium tantalate” are implanted by Ar⁺ ions with an energy of 100 keV and a dose of 10¹⁶ cm⁻². Analyses of the systems by AFM and SEM have shown that the ion implantation essentially modifies the near-surface structure resulting in...
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| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Дата: | 2007 |
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2007
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/117919 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate / V.O. Lysiuk, V.S. Staschuk, M.I. Kluy, O.V. Vakulenko, L.V. Poperenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2007. — Т. 10, № 2. — С. 76-80. — Бібліогр.: 13 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
nasplib_isofts_kiev_ua-123456789-117919 |
|---|---|
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dspace |
| spelling |
Lysiuk, V.O. Staschuk, V.S. Kluy, M.I. Vakulenko, O.V. Poperenko, L.V. 2017-05-27T12:22:27Z 2017-05-27T12:22:27Z 2007 Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate / V.O. Lysiuk, V.S. Staschuk, M.I. Kluy, O.V. Vakulenko, L.V. Poperenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2007. — Т. 10, № 2. — С. 76-80. — Бібліогр.: 13 назв. — англ. 1560-8034 PACS 68.55.Ln, 85.60.Gz https://nasplib.isofts.kiev.ua/handle/123456789/117919 The systems “thin Ni film – lithium niobate” and “thin Pd film – lithium tantalate” are implanted by Ar⁺ ions with an energy of 100 keV and a dose of 10¹⁶ cm⁻². Analyses of the systems by AFM and SEM have shown that the ion implantation essentially modifies the near-surface structure resulting in a change of its optical, electrical, and mechanical properties. Strong difference in the near-surface structures between implanted systems with Ni or Pd thin films is observed. Such a difference is explained by the heterogeneity of an ion beam and different properties of the materials. The application to the development of high-sensitive pyroelectric detectors with high damage threshold is proposed. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate |
| spellingShingle |
Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate Lysiuk, V.O. Staschuk, V.S. Kluy, M.I. Vakulenko, O.V. Poperenko, L.V. |
| title_short |
Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate |
| title_full |
Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate |
| title_fullStr |
Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate |
| title_full_unstemmed |
Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate |
| title_sort |
influence of ion implantation on the near-surface structure of thin ni and pd films on lithium niobate and lithium tantalate |
| author |
Lysiuk, V.O. Staschuk, V.S. Kluy, M.I. Vakulenko, O.V. Poperenko, L.V. |
| author_facet |
Lysiuk, V.O. Staschuk, V.S. Kluy, M.I. Vakulenko, O.V. Poperenko, L.V. |
| publishDate |
2007 |
| language |
English |
| container_title |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| format |
Article |
| description |
The systems “thin Ni film – lithium niobate” and “thin Pd film – lithium
tantalate” are implanted by Ar⁺ ions with an energy of 100 keV and a dose of 10¹⁶ cm⁻².
Analyses of the systems by AFM and SEM have shown that the ion implantation
essentially modifies the near-surface structure resulting in a change of its optical,
electrical, and mechanical properties. Strong difference in the near-surface structures
between implanted systems with Ni or Pd thin films is observed. Such a difference is
explained by the heterogeneity of an ion beam and different properties of the materials.
The application to the development of high-sensitive pyroelectric detectors with high
damage threshold is proposed.
|
| issn |
1560-8034 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/117919 |
| citation_txt |
Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate / V.O. Lysiuk, V.S. Staschuk, M.I. Kluy, O.V. Vakulenko, L.V. Poperenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2007. — Т. 10, № 2. — С. 76-80. — Бібліогр.: 13 назв. — англ. |
| work_keys_str_mv |
AT lysiukvo influenceofionimplantationonthenearsurfacestructureofthinniandpdfilmsonlithiumniobateandlithiumtantalate AT staschukvs influenceofionimplantationonthenearsurfacestructureofthinniandpdfilmsonlithiumniobateandlithiumtantalate AT kluymi influenceofionimplantationonthenearsurfacestructureofthinniandpdfilmsonlithiumniobateandlithiumtantalate AT vakulenkoov influenceofionimplantationonthenearsurfacestructureofthinniandpdfilmsonlithiumniobateandlithiumtantalate AT poperenkolv influenceofionimplantationonthenearsurfacestructureofthinniandpdfilmsonlithiumniobateandlithiumtantalate |
| first_indexed |
2025-12-07T17:30:09Z |
| last_indexed |
2025-12-07T17:30:09Z |
| _version_ |
1850871497288056832 |