APA (7th ed.) Citation

Usenko, A., & Carr, W. (1999). Silicon-on-insulator technology for microelectromechanical applications. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Usenko, A.Y, and W.N Carr. "Silicon-on-insulator Technology for Microelectromechanical Applications." Semiconductor Physics Quantum Electronics & Optoelectronics 1999.

MLA (8th ed.) Citation

Usenko, A.Y, and W.N Carr. "Silicon-on-insulator Technology for Microelectromechanical Applications." Semiconductor Physics Quantum Electronics & Optoelectronics, 1999.

Warning: These citations may not always be 100% accurate.