Silicon-on-insulator technology for microelectromechanical applications
A purpose of the paper is to give a review of recent development (1998-1999) in microelectromechanical (MEMS) devices formed on silicon-on-insulator (SOI) substrates. Advantages of using SOI are summarised. Problems of CMOS-MEMS integration for smart sensors are listed. Examples of successful use of...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 1999 |
| Main Authors: | , |
| Format: | Article |
| Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1999
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/117927 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Silicon-on-insulator technology for microelectromechanical applications / A.Y. Usenko, W.N. Carr // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 93-97. — Бібліогр.: 19 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862594207254839296 |
|---|---|
| author | Usenko, A.Y. Carr, W.N. |
| author_facet | Usenko, A.Y. Carr, W.N. |
| citation_txt | Silicon-on-insulator technology for microelectromechanical applications / A.Y. Usenko, W.N. Carr // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 93-97. — Бібліогр.: 19 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | A purpose of the paper is to give a review of recent development (1998-1999) in microelectromechanical (MEMS) devices formed on silicon-on-insulator (SOI) substrates. Advantages of using SOI are summarised. Problems of CMOS-MEMS integration for smart sensors are listed. Examples of successful use of SOI to fabricate advanced MEMS are given and future prospects MEMS on SOI are evaluated.
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| first_indexed | 2025-11-27T10:25:14Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-117927 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-27T10:25:14Z |
| publishDate | 1999 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Usenko, A.Y. Carr, W.N. 2017-05-27T16:04:41Z 2017-05-27T16:04:41Z 1999 Silicon-on-insulator technology for microelectromechanical applications / A.Y. Usenko, W.N. Carr // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 1. — С. 93-97. — Бібліогр.: 19 назв. — англ. 1560-8034 PACS: 07.79.-v, 07.10.Pz,) 7.10 Cm, 07.07.Df, 85.40.Qx, 84.37.+q https://nasplib.isofts.kiev.ua/handle/123456789/117927 A purpose of the paper is to give a review of recent development (1998-1999) in microelectromechanical (MEMS) devices formed on silicon-on-insulator (SOI) substrates. Advantages of using SOI are summarised. Problems of CMOS-MEMS integration for smart sensors are listed. Examples of successful use of SOI to fabricate advanced MEMS are given and future prospects MEMS on SOI are evaluated. This work is partially funded by US Ballistic Missile Defense Organization Contract № DASG60-98-M-0127. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Silicon-on-insulator technology for microelectromechanical applications Article published earlier |
| spellingShingle | Silicon-on-insulator technology for microelectromechanical applications Usenko, A.Y. Carr, W.N. |
| title | Silicon-on-insulator technology for microelectromechanical applications |
| title_full | Silicon-on-insulator technology for microelectromechanical applications |
| title_fullStr | Silicon-on-insulator technology for microelectromechanical applications |
| title_full_unstemmed | Silicon-on-insulator technology for microelectromechanical applications |
| title_short | Silicon-on-insulator technology for microelectromechanical applications |
| title_sort | silicon-on-insulator technology for microelectromechanical applications |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/117927 |
| work_keys_str_mv | AT usenkoay silicononinsulatortechnologyformicroelectromechanicalapplications AT carrwn silicononinsulatortechnologyformicroelectromechanicalapplications |