Determination of surface parameters of solids by methods of X-ray total external reflection

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2003
• ISSN: 1560-8034
• Main Authors: Balovsyak, S.V., Fodchuk, I.M., Lytvyn, P.M.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2003
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/117940
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Determination of surface parameters of solids by methods of X-ray total external reflection / S.V. Balovsyak, I.M. Fodchuk, P.M. Lytvyn // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 1. — С. 41-46. — Бібліогр.: 9 назв. — англ.

The series of GaAs and SiO₂ samples with the specially prepared one- and two-dimensional surface reliefs have been investigated by the methods of integral and differential curve total external reflection of X-rays. The direct and inverse problem was solved, taking into consideration data obtained by...