Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations

Fractal analysis was used for the description of the geometry of the clusters formed within the Monte Carlo simulation of the first monolayer growth on Si substrate. Pulse laser deposition method was assumed for the epitaxy. Layers were obtained for various substrate temperatures varying in the rang...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2003
Автори: Pyziak, L., Obermayr, W., Zembrowska, K., Kuzma, M.
Формат: Стаття
Мова:Англійська
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2003
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/118014
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations / L. Pyziak, W. Obermayr, K. Zembrowska, M. Kuzma // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 2. — С. 183-188. — Бібліогр.: 40 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
author_facet Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
citation_txt Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations / L. Pyziak, W. Obermayr, K. Zembrowska, M. Kuzma // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 2. — С. 183-188. — Бібліогр.: 40 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description Fractal analysis was used for the description of the geometry of the clusters formed within the Monte Carlo simulation of the first monolayer growth on Si substrate. Pulse laser deposition method was assumed for the epitaxy. Layers were obtained for various substrate temperatures varying in the range from 600 K to 800 K. The topography of plane clusters formed were characterised by their fractal box-like dimension. The relation between this dimension and the shape of the clusters was addressed.
first_indexed 2025-12-02T04:16:39Z
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
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language English
last_indexed 2025-12-02T04:16:39Z
publishDate 2003
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
2017-05-28T06:08:18Z
2017-05-28T06:08:18Z
2003
Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations / L. Pyziak, W. Obermayr, K. Zembrowska, M. Kuzma // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 2. — С. 183-188. — Бібліогр.: 40 назв. — англ.
1560-8034
PACS: 02.70.Uu, 61.43.Bn
https://nasplib.isofts.kiev.ua/handle/123456789/118014
Fractal analysis was used for the description of the geometry of the clusters formed within the Monte Carlo simulation of the first monolayer growth on Si substrate. Pulse laser deposition method was assumed for the epitaxy. Layers were obtained for various substrate temperatures varying in the range from 600 K to 800 K. The topography of plane clusters formed were characterised by their fractal box-like dimension. The relation between this dimension and the shape of the clusters was addressed.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
Article
published earlier
spellingShingle Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
title Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_full Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_fullStr Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_full_unstemmed Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_short Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_sort topography of si epitaxial monolayers obtained on si (001) substrate by computer simulations
url https://nasplib.isofts.kiev.ua/handle/123456789/118014
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AT obermayrw topographyofsiepitaxialmonolayersobtainedonsi001substratebycomputersimulations
AT zembrowskak topographyofsiepitaxialmonolayersobtainedonsi001substratebycomputersimulations
AT kuzmam topographyofsiepitaxialmonolayersobtainedonsi001substratebycomputersimulations