Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations

Fractal analysis was used for the description of the geometry of the clusters formed within the Monte Carlo simulation of the first monolayer growth on Si substrate. Pulse laser deposition method was assumed for the epitaxy. Layers were obtained for various substrate temperatures varying in the rang...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2003
Автори: Pyziak, L., Obermayr, W., Zembrowska, K., Kuzma, M.
Формат: Стаття
Мова:English
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2003
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/118014
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations / L. Pyziak, W. Obermayr, K. Zembrowska, M. Kuzma // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 2. — С. 183-188. — Бібліогр.: 40 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-118014
record_format dspace
spelling Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
2017-05-28T06:08:18Z
2017-05-28T06:08:18Z
2003
Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations / L. Pyziak, W. Obermayr, K. Zembrowska, M. Kuzma // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 2. — С. 183-188. — Бібліогр.: 40 назв. — англ.
1560-8034
PACS: 02.70.Uu, 61.43.Bn
https://nasplib.isofts.kiev.ua/handle/123456789/118014
Fractal analysis was used for the description of the geometry of the clusters formed within the Monte Carlo simulation of the first monolayer growth on Si substrate. Pulse laser deposition method was assumed for the epitaxy. Layers were obtained for various substrate temperatures varying in the range from 600 K to 800 K. The topography of plane clusters formed were characterised by their fractal box-like dimension. The relation between this dimension and the shape of the clusters was addressed.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
spellingShingle Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
title_short Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_full Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_fullStr Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_full_unstemmed Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations
title_sort topography of si epitaxial monolayers obtained on si (001) substrate by computer simulations
author Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
author_facet Pyziak, L.
Obermayr, W.
Zembrowska, K.
Kuzma, M.
publishDate 2003
language English
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
format Article
description Fractal analysis was used for the description of the geometry of the clusters formed within the Monte Carlo simulation of the first monolayer growth on Si substrate. Pulse laser deposition method was assumed for the epitaxy. Layers were obtained for various substrate temperatures varying in the range from 600 K to 800 K. The topography of plane clusters formed were characterised by their fractal box-like dimension. The relation between this dimension and the shape of the clusters was addressed.
issn 1560-8034
url https://nasplib.isofts.kiev.ua/handle/123456789/118014
citation_txt Topography of Si epitaxial monolayers obtained on Si (001) substrate by computer simulations / L. Pyziak, W. Obermayr, K. Zembrowska, M. Kuzma // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 2. — С. 183-188. — Бібліогр.: 40 назв. — англ.
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AT obermayrw topographyofsiepitaxialmonolayersobtainedonsi001substratebycomputersimulations
AT zembrowskak topographyofsiepitaxialmonolayersobtainedonsi001substratebycomputersimulations
AT kuzmam topographyofsiepitaxialmonolayersobtainedonsi001substratebycomputersimulations
first_indexed 2025-12-02T04:16:39Z
last_indexed 2025-12-02T04:16:39Z
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