Classification of microdefects in semiconducting silicon
On the basis of experimental analysis (preferential etching, transmission electron microscopy) of the dislocation-free silicon single crystals grown by floating-zone method (FZ-Si) and Czochralski method (Cz-Si), a classification of grown-in microdefects was compiled. The suggested classification is...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Datum: | 2003 |
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2003
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/118081 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Classification of microdefects in semiconducting silicon / V.I. Talanin, I.E. Talanin // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 431-436. — Бібліогр.: 40 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862746799275507712 |
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| author | Talanin, V.I. Talanin, I.E. |
| author_facet | Talanin, V.I. Talanin, I.E. |
| citation_txt | Classification of microdefects in semiconducting silicon / V.I. Talanin, I.E. Talanin // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 431-436. — Бібліогр.: 40 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | On the basis of experimental analysis (preferential etching, transmission electron microscopy) of the dislocation-free silicon single crystals grown by floating-zone method (FZ-Si) and Czochralski method (Cz-Si), a classification of grown-in microdefects was compiled. The suggested classification is founded on the heterogeneous formation mechanism of grown-in microdefects, which was justified earlier by us. The suggested classification is valid for crystals of either small or large diameter.
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| first_indexed | 2025-12-07T20:47:26Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-118081 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-07T20:47:26Z |
| publishDate | 2003 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Talanin, V.I. Talanin, I.E. 2017-05-28T16:39:55Z 2017-05-28T16:39:55Z 2003 Classification of microdefects in semiconducting silicon / V.I. Talanin, I.E. Talanin // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 431-436. — Бібліогр.: 40 назв. — англ. 1560-8034 PACS: 61.72.Bb; 61.72.Ji; 61.72.Yx https://nasplib.isofts.kiev.ua/handle/123456789/118081 On the basis of experimental analysis (preferential etching, transmission electron microscopy) of the dislocation-free silicon single crystals grown by floating-zone method (FZ-Si) and Czochralski method (Cz-Si), a classification of grown-in microdefects was compiled. The suggested classification is founded on the heterogeneous formation mechanism of grown-in microdefects, which was justified earlier by us. The suggested classification is valid for crystals of either small or large diameter. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Classification of microdefects in semiconducting silicon Article published earlier |
| spellingShingle | Classification of microdefects in semiconducting silicon Talanin, V.I. Talanin, I.E. |
| title | Classification of microdefects in semiconducting silicon |
| title_full | Classification of microdefects in semiconducting silicon |
| title_fullStr | Classification of microdefects in semiconducting silicon |
| title_full_unstemmed | Classification of microdefects in semiconducting silicon |
| title_short | Classification of microdefects in semiconducting silicon |
| title_sort | classification of microdefects in semiconducting silicon |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/118081 |
| work_keys_str_mv | AT talaninvi classificationofmicrodefectsinsemiconductingsilicon AT talaninie classificationofmicrodefectsinsemiconductingsilicon |