Vacuum method for creation of liquid crystal orienting microrelief

A mechanism for creation of microrelief surface anisotropy of amorphous films oxides materials which are obtained by oblique reactive cathode sputtering method is described. The influence of technological parameters of sputtering on the LC orienting parameters is investigated. The dependencies of th...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2003
Автори: Kolomzarov, Yu., Oleksenko, P., Sorokin, V., Tytarenko, P., Zelinskyy, R.
Формат: Стаття
Мова:Англійська
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2003
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/118102
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Vacuum method for creation of liquid crystal orienting microrelief / Yu. Kolomzarov, P. Oleksenko, V. Sorokin, P. Tytarenko, R. Zelinskyy // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 528-532. — Бібліогр.: 16 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
author_facet Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
citation_txt Vacuum method for creation of liquid crystal orienting microrelief / Yu. Kolomzarov, P. Oleksenko, V. Sorokin, P. Tytarenko, R. Zelinskyy // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 528-532. — Бібліогр.: 16 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description A mechanism for creation of microrelief surface anisotropy of amorphous films oxides materials which are obtained by oblique reactive cathode sputtering method is described. The influence of technological parameters of sputtering on the LC orienting parameters is investigated. The dependencies of the target material, angle of material emission and reemission processes under the substrate negative ion treatment is shown. The application of oblique reactive cathode sputtering method for creation of LCD with differ-ent size is demonstrated.
first_indexed 2025-11-28T09:23:22Z
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
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language English
last_indexed 2025-11-28T09:23:22Z
publishDate 2003
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
2017-05-28T17:10:54Z
2017-05-28T17:10:54Z
2003
Vacuum method for creation of liquid crystal orienting microrelief / Yu. Kolomzarov, P. Oleksenko, V. Sorokin, P. Tytarenko, R. Zelinskyy // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 528-532. — Бібліогр.: 16 назв. — англ.
1560-8034
PACS: 42.79.Kr
https://nasplib.isofts.kiev.ua/handle/123456789/118102
A mechanism for creation of microrelief surface anisotropy of amorphous films oxides materials which are obtained by oblique reactive cathode sputtering method is described. The influence of technological parameters of sputtering on the LC orienting parameters is investigated. The dependencies of the target material, angle of material emission and reemission processes under the substrate negative ion treatment is shown. The application of oblique reactive cathode sputtering method for creation of LCD with differ-ent size is demonstrated.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Vacuum method for creation of liquid crystal orienting microrelief
Article
published earlier
spellingShingle Vacuum method for creation of liquid crystal orienting microrelief
Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
title Vacuum method for creation of liquid crystal orienting microrelief
title_full Vacuum method for creation of liquid crystal orienting microrelief
title_fullStr Vacuum method for creation of liquid crystal orienting microrelief
title_full_unstemmed Vacuum method for creation of liquid crystal orienting microrelief
title_short Vacuum method for creation of liquid crystal orienting microrelief
title_sort vacuum method for creation of liquid crystal orienting microrelief
url https://nasplib.isofts.kiev.ua/handle/123456789/118102
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AT oleksenkop vacuummethodforcreationofliquidcrystalorientingmicrorelief
AT sorokinv vacuummethodforcreationofliquidcrystalorientingmicrorelief
AT tytarenkop vacuummethodforcreationofliquidcrystalorientingmicrorelief
AT zelinskyyr vacuummethodforcreationofliquidcrystalorientingmicrorelief