Vacuum method for creation of liquid crystal orienting microrelief

A mechanism for creation of microrelief surface anisotropy of amorphous films oxides materials which are obtained by oblique reactive cathode sputtering method is described. The influence of technological parameters of sputtering on the LC orienting parameters is investigated. The dependencies of th...

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Published in:Semiconductor Physics Quantum Electronics & Optoelectronics
Date:2003
Main Authors: Kolomzarov, Yu., Oleksenko, P., Sorokin, V., Tytarenko, P., Zelinskyy, R.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2003
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/118102
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Vacuum method for creation of liquid crystal orienting microrelief / Yu. Kolomzarov, P. Oleksenko, V. Sorokin, P. Tytarenko, R. Zelinskyy // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 528-532. — Бібліогр.: 16 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-118102
record_format dspace
spelling Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
2017-05-28T17:10:54Z
2017-05-28T17:10:54Z
2003
Vacuum method for creation of liquid crystal orienting microrelief / Yu. Kolomzarov, P. Oleksenko, V. Sorokin, P. Tytarenko, R. Zelinskyy // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 528-532. — Бібліогр.: 16 назв. — англ.
1560-8034
PACS: 42.79.Kr
https://nasplib.isofts.kiev.ua/handle/123456789/118102
A mechanism for creation of microrelief surface anisotropy of amorphous films oxides materials which are obtained by oblique reactive cathode sputtering method is described. The influence of technological parameters of sputtering on the LC orienting parameters is investigated. The dependencies of the target material, angle of material emission and reemission processes under the substrate negative ion treatment is shown. The application of oblique reactive cathode sputtering method for creation of LCD with differ-ent size is demonstrated.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Vacuum method for creation of liquid crystal orienting microrelief
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Vacuum method for creation of liquid crystal orienting microrelief
spellingShingle Vacuum method for creation of liquid crystal orienting microrelief
Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
title_short Vacuum method for creation of liquid crystal orienting microrelief
title_full Vacuum method for creation of liquid crystal orienting microrelief
title_fullStr Vacuum method for creation of liquid crystal orienting microrelief
title_full_unstemmed Vacuum method for creation of liquid crystal orienting microrelief
title_sort vacuum method for creation of liquid crystal orienting microrelief
author Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
author_facet Kolomzarov, Yu.
Oleksenko, P.
Sorokin, V.
Tytarenko, P.
Zelinskyy, R.
publishDate 2003
language English
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
format Article
description A mechanism for creation of microrelief surface anisotropy of amorphous films oxides materials which are obtained by oblique reactive cathode sputtering method is described. The influence of technological parameters of sputtering on the LC orienting parameters is investigated. The dependencies of the target material, angle of material emission and reemission processes under the substrate negative ion treatment is shown. The application of oblique reactive cathode sputtering method for creation of LCD with differ-ent size is demonstrated.
issn 1560-8034
url https://nasplib.isofts.kiev.ua/handle/123456789/118102
citation_txt Vacuum method for creation of liquid crystal orienting microrelief / Yu. Kolomzarov, P. Oleksenko, V. Sorokin, P. Tytarenko, R. Zelinskyy // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 528-532. — Бібліогр.: 16 назв. — англ.
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AT sorokinv vacuummethodforcreationofliquidcrystalorientingmicrorelief
AT tytarenkop vacuummethodforcreationofliquidcrystalorientingmicrorelief
AT zelinskyyr vacuummethodforcreationofliquidcrystalorientingmicrorelief
first_indexed 2025-11-28T09:23:22Z
last_indexed 2025-11-28T09:23:22Z
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