Periodic subsurface structures in GaAs formed by spatially modulated nanosecond pulse laser irradiation

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2007
• Main Authors: Moscal, D.S., Fedorenko, L.L., Yusupov, M.M., Golodenko, M.M.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2007
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/118129
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Periodic subsurface structures in GaAs formed by spatially modulated nanosecond pulse laser irradiation / D.S. Moscal, L.L. Fedorenko, M.M. Yusupov, M.M. Golodenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2007. — Т. 10, № 3. — С. 80-83. — Бібліогр.: 14 назв. — англ.

We used the method of nets to calculate the thermoelastic stresses on the GaAs
 surface caused by a non-destructive nanosecond pulse laser irradiation (λ = 0.532 µm)
 with diffraction spatial intensity modulation from a shield with rectangular cut. The
 structure of irradiate...