Ellipsometric control of quality of polished MgF₂ optical ceramics

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2004
• Main Authors: Maslov, V.P., Sarsembaeva, A.Z., Sizov, F.F.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2004
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/118175
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Ellipsometric control of quality of polished MgF₂ optical ceramics / V.P. Maslov, A.Z. Sarsembaeva, F.F. Sizov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 2. — С. 199-201. — Бібліогр.: 9 назв. — англ.

In this work, ellipsometric measurements were used to optimise the technology of machine working the polished parts made of MgF₂ optical ceramics. The ellipsometry is a high-performance contactless method to control quality of optical surfaces, which is used here due to a sharp response of light pol...