Carbides of A³B⁵ compounds – new class materials for opto- and microelectronics
Discussed in this paper are options for replacing the virtual structure of SiC atoms with AlN compound. The Al₄C₃, AlNC and AlNOC compounds in vapor and solid epitaxial processes have been obtained as a result of carbothermic reduction. Analized is the role of precursors in the way of reducing th...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Datum: | 2012 |
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2012
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/118271 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Carbides of A³B⁵ compounds – new class materials for opto- and microelectronics / V.I. Osinsky, I.V. Masol, N.N. Lyahova, P.V. Deminsky // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 1. — С. 55-60. — Бібліогр.: 5 назв. — англ. |