Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2014
• Main Authors: Klochko, N.P., Klepikova, K.S., Khrypunov, G.S., Pirohov, O.V., Novikov, V.A.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2014
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/118415
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Nanoscale tin dioxide films and zinc oxide hierarchical nanostructures for gas sensing applications / N.P. Klochko, K.S. Klepikova, G.S. Khrypunov, O.V. Pirohov, V.A. Novikov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 358-367. — Бібліогр.: 16 назв. — англ.

Nanoscale tin dioxide (SnO₂) and zinc oxide (ZnO) layers are considered as promising candidates for preparation of sensing elements for metal oxide semiconductor gas sensors. Tin dioxide films deposited by direct current magnetron sputtering are investigated. The influence of deposition temperatu...