High-speed optical recording in vitreous chalcogenide thin films

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2014
• Main Authors: Kryuchyn, A.A., Petrov, V.V., Rubish, V.M., Lapchuk, A.S., Kostyukevych, S.O., Shepeliavyi, P.E., Kostyukevych, K.V.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2014
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/118425
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: High-speed optical recording in vitreous chalcogenide thin films / A.A. Kryuchyn, V.V. Petrov, V.M. Rubish, A.S. Lapchuk, S.O. Kostyukevych, P.E. Shepeliavyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 389-393. — Бібліогр.: 11 назв. — англ.

Thin films of glassy chalcogenide semiconductor are widely used as recording media in optical data storage. To obtain relief micro- and nanoscale structures on the surface of optical master discs inorganic photoresists based on chalcogenide glassy semiconductors can be used. They have high resolu...