APA (7th ed.) Citation

Steblova, O., Evtukh, A., Bratus’, O., Fedorenko, L., Voitovych, M., Lytvyn, O., . . . Semchuk, O. (2014). Transformation of SiOx films into nanocomposite SiO₂(Si) films under thermal and laser annealing. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Steblova, O.V, A.A Evtukh, O.I Bratus’, L.L Fedorenko, M.V Voitovych, O.S Lytvyn, O.O Gavrylyuk, and O.Yu Semchuk. "Transformation of SiOx Films into Nanocomposite SiO₂(Si) Films Under Thermal and Laser Annealing." Semiconductor Physics Quantum Electronics & Optoelectronics 2014.

MLA (8th ed.) Citation

Steblova, O.V, et al. "Transformation of SiOx Films into Nanocomposite SiO₂(Si) Films Under Thermal and Laser Annealing." Semiconductor Physics Quantum Electronics & Optoelectronics, 2014.

Warning: These citations may not always be 100% accurate.