Compact-sized excimer laser with two-side preionization

• Veröffentlicht in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Datum: 2010
• Hauptverfasser: Baschenko, S.M., Marchenko, L.S.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2010
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/118566
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ.

Compact-sized monopulse excimer laser with the foot-print equal to only
 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
 energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
 pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
 height of beam in combination with low weight of laser (5 kg) allow this laser to be used
 in various optical schemes, where traditional, typical bulky ecximer lasers are
 unapplicable. Moreover, small dimensions, low weight in combination with low energy
 consumption (a few watts) allow them to be used in clear “field” conditions. Beside
 abovementioned characteristics, the designed laser differs from the traditional ones by
 two-side preionization that has a “spark” character near the “hot” massive electrode and
 the so-called “capacitive” or “barrier” one under the ground grid. This two-side
 preionization provides both igniting and sustaining of wider discharge thus allowing to
 reach beam with higher symmetry – its cross-section is 15×20 mm².