Compact-sized excimer laser with two-side preionization
Compact-sized monopulse excimer laser with the foot-print equal to only 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2 pulses per second, beam divergence – 8 milliradians. The...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2010 |
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/118566 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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Baschenko, S.M. Marchenko, L.S. 2017-05-30T16:20:36Z 2017-05-30T16:20:36Z 2010 Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. 1560-8034 PACS 42.55.Lt https://nasplib.isofts.kiev.ua/handle/123456789/118566 Compact-sized monopulse excimer laser with the foot-print equal to only 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2 pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis height of beam in combination with low weight of laser (5 kg) allow this laser to be used in various optical schemes, where traditional, typical bulky ecximer lasers are unapplicable. Moreover, small dimensions, low weight in combination with low energy consumption (a few watts) allow them to be used in clear “field” conditions. Beside abovementioned characteristics, the designed laser differs from the traditional ones by two-side preionization that has a “spark” character near the “hot” massive electrode and the so-called “capacitive” or “barrier” one under the ground grid. This two-side preionization provides both igniting and sustaining of wider discharge thus allowing to reach beam with higher symmetry – its cross-section is 15×20 mm². en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Compact-sized excimer laser with two-side preionization Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
Compact-sized excimer laser with two-side preionization |
| spellingShingle |
Compact-sized excimer laser with two-side preionization Baschenko, S.M. Marchenko, L.S. |
| title_short |
Compact-sized excimer laser with two-side preionization |
| title_full |
Compact-sized excimer laser with two-side preionization |
| title_fullStr |
Compact-sized excimer laser with two-side preionization |
| title_full_unstemmed |
Compact-sized excimer laser with two-side preionization |
| title_sort |
compact-sized excimer laser with two-side preionization |
| author |
Baschenko, S.M. Marchenko, L.S. |
| author_facet |
Baschenko, S.M. Marchenko, L.S. |
| publishDate |
2010 |
| language |
English |
| container_title |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| format |
Article |
| description |
Compact-sized monopulse excimer laser with the foot-print equal to only
250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
height of beam in combination with low weight of laser (5 kg) allow this laser to be used
in various optical schemes, where traditional, typical bulky ecximer lasers are
unapplicable. Moreover, small dimensions, low weight in combination with low energy
consumption (a few watts) allow them to be used in clear “field” conditions. Beside
abovementioned characteristics, the designed laser differs from the traditional ones by
two-side preionization that has a “spark” character near the “hot” massive electrode and
the so-called “capacitive” or “barrier” one under the ground grid. This two-side
preionization provides both igniting and sustaining of wider discharge thus allowing to
reach beam with higher symmetry – its cross-section is 15×20 mm².
|
| issn |
1560-8034 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/118566 |
| citation_txt |
Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
| work_keys_str_mv |
AT baschenkosm compactsizedexcimerlaserwithtwosidepreionization AT marchenkols compactsizedexcimerlaserwithtwosidepreionization |
| first_indexed |
2025-11-28T12:05:18Z |
| last_indexed |
2025-11-28T12:05:18Z |
| _version_ |
1850853732141498368 |