Compact-sized excimer laser with two-side preionization
Compact-sized monopulse excimer laser with the foot-print equal to only
 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
 energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
 pulses per second, beam divergen...
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| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Дата: | 2010 |
| Автори: | , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
|
| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/118566 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862606299675492352 |
|---|---|
| author | Baschenko, S.M. Marchenko, L.S. |
| author_facet | Baschenko, S.M. Marchenko, L.S. |
| citation_txt | Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | Compact-sized monopulse excimer laser with the foot-print equal to only
250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
height of beam in combination with low weight of laser (5 kg) allow this laser to be used
in various optical schemes, where traditional, typical bulky ecximer lasers are
unapplicable. Moreover, small dimensions, low weight in combination with low energy
consumption (a few watts) allow them to be used in clear “field” conditions. Beside
abovementioned characteristics, the designed laser differs from the traditional ones by
two-side preionization that has a “spark” character near the “hot” massive electrode and
the so-called “capacitive” or “barrier” one under the ground grid. This two-side
preionization provides both igniting and sustaining of wider discharge thus allowing to
reach beam with higher symmetry – its cross-section is 15×20 mm².
|
| first_indexed | 2025-11-28T12:05:18Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-118566 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-28T12:05:18Z |
| publishDate | 2010 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Baschenko, S.M. Marchenko, L.S. 2017-05-30T16:20:36Z 2017-05-30T16:20:36Z 2010 Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ. 1560-8034 PACS 42.55.Lt https://nasplib.isofts.kiev.ua/handle/123456789/118566 Compact-sized monopulse excimer laser with the foot-print equal to only
 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
 energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
 pulses per second, beam divergence – 8 milliradians. The small foot-print, small axis
 height of beam in combination with low weight of laser (5 kg) allow this laser to be used
 in various optical schemes, where traditional, typical bulky ecximer lasers are
 unapplicable. Moreover, small dimensions, low weight in combination with low energy
 consumption (a few watts) allow them to be used in clear “field” conditions. Beside
 abovementioned characteristics, the designed laser differs from the traditional ones by
 two-side preionization that has a “spark” character near the “hot” massive electrode and
 the so-called “capacitive” or “barrier” one under the ground grid. This two-side
 preionization provides both igniting and sustaining of wider discharge thus allowing to
 reach beam with higher symmetry – its cross-section is 15×20 mm². en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Compact-sized excimer laser with two-side preionization Article published earlier |
| spellingShingle | Compact-sized excimer laser with two-side preionization Baschenko, S.M. Marchenko, L.S. |
| title | Compact-sized excimer laser with two-side preionization |
| title_full | Compact-sized excimer laser with two-side preionization |
| title_fullStr | Compact-sized excimer laser with two-side preionization |
| title_full_unstemmed | Compact-sized excimer laser with two-side preionization |
| title_short | Compact-sized excimer laser with two-side preionization |
| title_sort | compact-sized excimer laser with two-side preionization |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/118566 |
| work_keys_str_mv | AT baschenkosm compactsizedexcimerlaserwithtwosidepreionization AT marchenkols compactsizedexcimerlaserwithtwosidepreionization |