Compact-sized excimer laser with two-side preionization

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2010
• Main Authors: Baschenko, S.M., Marchenko, L.S.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2010
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/118566
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Compact-sized excimer laser with two-side preionization / S.M. Baschenko, L.S. Marchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 426-427. — Бібліогр.: 3 назв. — англ.

Compact-sized monopulse excimer laser with the foot-print equal to only
 250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
 energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal repetition rate – 1-2
 pulses per second, beam divergen...