Complex destruction of near-surface silicon layers of Si-SiO₂ structure
The structure of near-surface silicon layers of Si-SiO₂ has been investigated. It
 was observed the complex destruction of these layers caused by relaxation of mechanical
 stresses. The magnitude of mechanical stresses depends not only on parameters of silicon
 dioxide and si...
Gespeichert in:
| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Datum: | 2010 |
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
|
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/118578 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Complex destruction of near-surface silicon layers of Si-SiO₂ structure / I.R. Yatsunskiy, O.A. Kulinich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 418-421. — Бібліогр.: 8 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862552739166289920 |
|---|---|
| author | Yatsunskiy, I.R. Kulinich, O.A. |
| author_facet | Yatsunskiy, I.R. Kulinich, O.A. |
| citation_txt | Complex destruction of near-surface silicon layers of Si-SiO₂ structure / I.R. Yatsunskiy, O.A. Kulinich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 418-421. — Бібліогр.: 8 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | The structure of near-surface silicon layers of Si-SiO₂ has been investigated. It
was observed the complex destruction of these layers caused by relaxation of mechanical
stresses. The magnitude of mechanical stresses depends not only on parameters of silicon
dioxide and silicon but on presence of initial defects in silicon. We have proposed the
defect formation mechanism of near-surface layers in Si-SiO₂ structure, and it has been
revealed the influence of impurities on this process.
|
| first_indexed | 2025-11-25T21:02:31Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-118578 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-25T21:02:31Z |
| publishDate | 2010 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Yatsunskiy, I.R. Kulinich, O.A. 2017-05-30T16:31:53Z 2017-05-30T16:31:53Z 2010 Complex destruction of near-surface silicon layers of Si-SiO₂ structure / I.R. Yatsunskiy, O.A. Kulinich // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 418-421. — Бібліогр.: 8 назв. — англ. 1560-8034 PACS 61.05.cm, 61.72.Cc, 68.35.bg https://nasplib.isofts.kiev.ua/handle/123456789/118578 The structure of near-surface silicon layers of Si-SiO₂ has been investigated. It
 was observed the complex destruction of these layers caused by relaxation of mechanical
 stresses. The magnitude of mechanical stresses depends not only on parameters of silicon
 dioxide and silicon but on presence of initial defects in silicon. We have proposed the
 defect formation mechanism of near-surface layers in Si-SiO₂ structure, and it has been
 revealed the influence of impurities on this process. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Complex destruction of near-surface silicon layers of Si-SiO₂ structure Article published earlier |
| spellingShingle | Complex destruction of near-surface silicon layers of Si-SiO₂ structure Yatsunskiy, I.R. Kulinich, O.A. |
| title | Complex destruction of near-surface silicon layers of Si-SiO₂ structure |
| title_full | Complex destruction of near-surface silicon layers of Si-SiO₂ structure |
| title_fullStr | Complex destruction of near-surface silicon layers of Si-SiO₂ structure |
| title_full_unstemmed | Complex destruction of near-surface silicon layers of Si-SiO₂ structure |
| title_short | Complex destruction of near-surface silicon layers of Si-SiO₂ structure |
| title_sort | complex destruction of near-surface silicon layers of si-sio₂ structure |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/118578 |
| work_keys_str_mv | AT yatsunskiyir complexdestructionofnearsurfacesiliconlayersofsisio2structure AT kulinichoa complexdestructionofnearsurfacesiliconlayersofsisio2structure |