Testing the optical methods by using the multi-level holographic grating
In this work the interaction peculiarities of electro-magnetic optical range
 radiation with gratings’ surfaces are investigated. The multilevel diffractive holographic
 grating is proposed to be used for the polarization optical methods testing. This object
 allowed to obtai...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Date: | 2009 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2009
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/118614 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Testing the optical methods by using the multi-level holographic grating / О.I.Barchuk, Y.V.Braginets, O.S.Klimov, Y.A.Oberemok, S.N.Savenkov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 1. — С. 57-63. — Бібліогр.: 18 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862648098203893760 |
|---|---|
| author | Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. |
| author_facet | Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. |
| citation_txt | Testing the optical methods by using the multi-level holographic grating / О.I.Barchuk, Y.V.Braginets, O.S.Klimov, Y.A.Oberemok, S.N.Savenkov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 1. — С. 57-63. — Бібліогр.: 18 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | In this work the interaction peculiarities of electro-magnetic optical range
radiation with gratings’ surfaces are investigated. The multilevel diffractive holographic
grating is proposed to be used for the polarization optical methods testing. This object
allowed to obtain simultaneous visualization of different spatial frequencies and to
estimate both structure and surface peculiarities when working with 3D-objects. Using
this additional information one can remove uncertainty in solution of the inverse problem
of ellipsometry related with ellipsometric angles periodicity. Thereby, multiangle
ellipsometry allowing investigation of the specular reflection component could be used to
study submicron peculiarities of the object. We have also presented the basic aspects of
ellipsometric method optimization. It was shown that anisotropy parameters, such as
linear amplitude anisotropy and linear phase anisotropy, obtained from ellipsometric
measurements are the most effective to ascertain the submicron characteristic dimension
of material.
|
| first_indexed | 2025-12-01T14:16:32Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-118614 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-01T14:16:32Z |
| publishDate | 2009 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. 2017-05-30T17:27:25Z 2017-05-30T17:27:25Z 2009 Testing the optical methods by using the multi-level holographic grating / О.I.Barchuk, Y.V.Braginets, O.S.Klimov, Y.A.Oberemok, S.N.Savenkov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 1. — С. 57-63. — Бібліогр.: 18 назв. — англ. 1560-8034 PACS 81.16.Nd, 85.40.Hp https://nasplib.isofts.kiev.ua/handle/123456789/118614 In this work the interaction peculiarities of electro-magnetic optical range
 radiation with gratings’ surfaces are investigated. The multilevel diffractive holographic
 grating is proposed to be used for the polarization optical methods testing. This object
 allowed to obtain simultaneous visualization of different spatial frequencies and to
 estimate both structure and surface peculiarities when working with 3D-objects. Using
 this additional information one can remove uncertainty in solution of the inverse problem
 of ellipsometry related with ellipsometric angles periodicity. Thereby, multiangle
 ellipsometry allowing investigation of the specular reflection component could be used to
 study submicron peculiarities of the object. We have also presented the basic aspects of
 ellipsometric method optimization. It was shown that anisotropy parameters, such as
 linear amplitude anisotropy and linear phase anisotropy, obtained from ellipsometric
 measurements are the most effective to ascertain the submicron characteristic dimension
 of material. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Testing the optical methods by using the multi-level holographic grating Article published earlier |
| spellingShingle | Testing the optical methods by using the multi-level holographic grating Barchuk, О.I. Braginets, Y.V. Klimov, O.S. Oberemok, Y.A. Savenkov, S.N. |
| title | Testing the optical methods by using the multi-level holographic grating |
| title_full | Testing the optical methods by using the multi-level holographic grating |
| title_fullStr | Testing the optical methods by using the multi-level holographic grating |
| title_full_unstemmed | Testing the optical methods by using the multi-level holographic grating |
| title_short | Testing the optical methods by using the multi-level holographic grating |
| title_sort | testing the optical methods by using the multi-level holographic grating |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/118614 |
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