Spectral-ellipsometric examining the films of gold nanoparticles on Si/SiO₂ substrate

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2012
• Main Authors: Bortchagovsky, E.G., Lozovski, V.Z., Mishakova, T.O., Hingerl, K.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2012
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/118718
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Spectral-ellipsometric examining the films of gold nanoparticles on Si/SiO₂ substrate / E.G. Bortchagovsky, V.Z. Lozovski, T.O. Mishakova, K. Hingerl // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 4. — С. 360-364. — Бібліогр.: 9 назв. — англ.

We have investigated optical properties of films of gold nanoparticles on Si/SiO₂ substrate by using the method of spectroscopic ellipsometry in dependence on morphology of the films. Different morphology of the films was obtained by flashannealing at various temperatures of identical sputtered t...