Perspectives for using technology of laser thermolithography

• Veröffentlicht in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Datum: 2012
• ISSN: 1560-8034
• Hauptverfasser: Kryuchyn, A.A., Lapchuk, A.S., Bryts’kyi, A.I., Kostyukevych, S.O.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2012
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/118722
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Perspectives for using technology of laser thermolithography / A.A. Kryuchyn, A.S. Lapchuk, A.I. Bryts’kyi, S.O. Kostyukevych // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 4. — С. 328-332. — Бібліогр.: 9 назв. — англ.

Analyzed in this work are the requirements to an optical system for laser
 thermolithographic recording. It has been shown that possibilities of this type recording
 with decreasing the registered element sizes can be realized only when using special
 measures for stabilizing...