Nazarov, A., Lysenko, V., & Nazarova, T. (2008). Hydrogen plasma treatment of silicon thin-film structures and nanostructured layers. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Nazarov, A.N, V.S Lysenko, und T.M Nazarova. "Hydrogen Plasma Treatment of Silicon Thin-film Structures and Nanostructured Layers." Semiconductor Physics Quantum Electronics & Optoelectronics 2008.
MLA-Zitierstil (8. Ausg.)Nazarov, A.N, et al. "Hydrogen Plasma Treatment of Silicon Thin-film Structures and Nanostructured Layers." Semiconductor Physics Quantum Electronics & Optoelectronics, 2008.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.