APA (7th ed.) Citation

Nazarov, A., Lysenko, V., & Nazarova, T. (2008). Hydrogen plasma treatment of silicon thin-film structures and nanostructured layers. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Nazarov, A.N, V.S Lysenko, and T.M Nazarova. "Hydrogen Plasma Treatment of Silicon Thin-film Structures and Nanostructured Layers." Semiconductor Physics Quantum Electronics & Optoelectronics 2008.

MLA (8th ed.) Citation

Nazarov, A.N, et al. "Hydrogen Plasma Treatment of Silicon Thin-film Structures and Nanostructured Layers." Semiconductor Physics Quantum Electronics & Optoelectronics, 2008.

Warning: These citations may not always be 100% accurate.