Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
We studied the effect of laser treatment on the glass-Si₃N₄-Si-SiO₂ structures. It is shown that laser treatment causes appearance of an additional band in
 their transmission spectra as well as smearing of grain structure at their surface.
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Date: | 2009 |
| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2009
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/118876 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment / R.V. Konakova, V.P. Kladko, O.S. Lytvyn, O.B. Okhrimenko, B.G. Konoplev, A.M. Svetlichnyi, V.N. Lissotschenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 3. — С. 284-286. — Бібліогр.: 7 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862538820490100736 |
|---|---|
| author | Konakova, R.V. Kladko, V.P. Lytvyn, O.S. Okhrimenko, O.B. Konoplev, B.G. Svetlichnyi, A.M. Lissotschenko, V.N. |
| author_facet | Konakova, R.V. Kladko, V.P. Lytvyn, O.S. Okhrimenko, O.B. Konoplev, B.G. Svetlichnyi, A.M. Lissotschenko, V.N. |
| citation_txt | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment / R.V. Konakova, V.P. Kladko, O.S. Lytvyn, O.B. Okhrimenko, B.G. Konoplev, A.M. Svetlichnyi, V.N. Lissotschenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 3. — С. 284-286. — Бібліогр.: 7 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | We studied the effect of laser treatment on the glass-Si₃N₄-Si-SiO₂ structures. It is shown that laser treatment causes appearance of an additional band in
their transmission spectra as well as smearing of grain structure at their surface.
|
| first_indexed | 2025-11-24T15:15:03Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-118876 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-24T15:15:03Z |
| publishDate | 2009 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Konakova, R.V. Kladko, V.P. Lytvyn, O.S. Okhrimenko, O.B. Konoplev, B.G. Svetlichnyi, A.M. Lissotschenko, V.N. 2017-05-31T19:49:39Z 2017-05-31T19:49:39Z 2009 Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment / R.V. Konakova, V.P. Kladko, O.S. Lytvyn, O.B. Okhrimenko, B.G. Konoplev, A.M. Svetlichnyi, V.N. Lissotschenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 3. — С. 284-286. — Бібліогр.: 7 назв. — англ. 1560-8034 PACS 71.20.Nr, 78.40.Fy https://nasplib.isofts.kiev.ua/handle/123456789/118876 We studied the effect of laser treatment on the glass-Si₃N₄-Si-SiO₂ structures. It is shown that laser treatment causes appearance of an additional band in
 their transmission spectra as well as smearing of grain structure at their surface. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment Article published earlier |
| spellingShingle | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment Konakova, R.V. Kladko, V.P. Lytvyn, O.S. Okhrimenko, O.B. Konoplev, B.G. Svetlichnyi, A.M. Lissotschenko, V.N. |
| title | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment |
| title_full | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment |
| title_fullStr | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment |
| title_full_unstemmed | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment |
| title_short | Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment |
| title_sort | modification of properties of the glass-si₃n₄-si-sio₂ structure at laser treatment |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/118876 |
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