Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment

We studied the effect of laser treatment on the glass-Si₃N₄-Si-SiO₂ structures. It is shown that laser treatment causes appearance of an additional band in
 their transmission spectra as well as smearing of grain structure at their surface.

Збережено в:
Бібліографічні деталі
Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2009
Автори: Konakova, R.V., Kladko, V.P., Lytvyn, O.S., Okhrimenko, O.B., Konoplev, B.G., Svetlichnyi, A.M., Lissotschenko, V.N.
Формат: Стаття
Мова:Англійська
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2009
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/118876
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment / R.V. Konakova, V.P. Kladko, O.S. Lytvyn, O.B. Okhrimenko, B.G. Konoplev, A.M. Svetlichnyi, V.N. Lissotschenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 3. — С. 284-286. — Бібліогр.: 7 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Konakova, R.V.
Kladko, V.P.
Lytvyn, O.S.
Okhrimenko, O.B.
Konoplev, B.G.
Svetlichnyi, A.M.
Lissotschenko, V.N.
author_facet Konakova, R.V.
Kladko, V.P.
Lytvyn, O.S.
Okhrimenko, O.B.
Konoplev, B.G.
Svetlichnyi, A.M.
Lissotschenko, V.N.
citation_txt Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment / R.V. Konakova, V.P. Kladko, O.S. Lytvyn, O.B. Okhrimenko, B.G. Konoplev, A.M. Svetlichnyi, V.N. Lissotschenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 3. — С. 284-286. — Бібліогр.: 7 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description We studied the effect of laser treatment on the glass-Si₃N₄-Si-SiO₂ structures. It is shown that laser treatment causes appearance of an additional band in
 their transmission spectra as well as smearing of grain structure at their surface.
first_indexed 2025-11-24T15:15:03Z
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
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language English
last_indexed 2025-11-24T15:15:03Z
publishDate 2009
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Konakova, R.V.
Kladko, V.P.
Lytvyn, O.S.
Okhrimenko, O.B.
Konoplev, B.G.
Svetlichnyi, A.M.
Lissotschenko, V.N.
2017-05-31T19:49:39Z
2017-05-31T19:49:39Z
2009
Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment / R.V. Konakova, V.P. Kladko, O.S. Lytvyn, O.B. Okhrimenko, B.G. Konoplev, A.M. Svetlichnyi, V.N. Lissotschenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 3. — С. 284-286. — Бібліогр.: 7 назв. — англ.
1560-8034
PACS 71.20.Nr, 78.40.Fy
https://nasplib.isofts.kiev.ua/handle/123456789/118876
We studied the effect of laser treatment on the glass-Si₃N₄-Si-SiO₂ structures. It is shown that laser treatment causes appearance of an additional band in
 their transmission spectra as well as smearing of grain structure at their surface.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
Article
published earlier
spellingShingle Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
Konakova, R.V.
Kladko, V.P.
Lytvyn, O.S.
Okhrimenko, O.B.
Konoplev, B.G.
Svetlichnyi, A.M.
Lissotschenko, V.N.
title Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
title_full Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
title_fullStr Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
title_full_unstemmed Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
title_short Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
title_sort modification of properties of the glass-si₃n₄-si-sio₂ structure at laser treatment
url https://nasplib.isofts.kiev.ua/handle/123456789/118876
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AT konoplevbg modificationofpropertiesoftheglasssi3n4sisio2structureatlasertreatment
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