Research of structures with corrugated photoreceiving surface

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2004
• Main Authors: Karimov, A.V., Yodgorova, D.M., Yakubov, E.N.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2004
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/119218
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Research of structures with corrugated photoreceiving surface / A.V. Karimov, D.M. Yodgorova, E.N. Yakubov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 372-376. — Бібліогр.: 4 назв. — англ.

Goffered photoreceiver surface in active regions perspective for manufacturing photosensitive structures can be form by chemical and epitaxial technology. Microreliefs are created on initial surface of semiconductor material by chemical method that comprises etching in special solutions. Epitaxial t...