Recording the high efficient diffraction gratings by using He-Cd laser
High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy reve...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Datum: | 2004 |
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| Sprache: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2004
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| Zitieren: | Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ. |
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Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. 2017-06-05T14:34:32Z 2017-06-05T14:34:32Z 2004 Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ. 1560-8034 PACS:42.40.Eq, 42.70.Ln https://nasplib.isofts.kiev.ua/handle/123456789/119231 High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy revealed that As₄₀S₆₀–хSeх resists allows one to record grating originals with profiles of various heights depending on the resist chemical composition, its etching and exposure times. We obtained typical spectral and angular dependences of the first order diffraction efficiency for the grating with the high modulation depth and groove profile close to the sinusoidal one. Comparing the recorded gratings with different spatial frequencies, exposure and etching times, we determined optimal recording conditions (exposure and etching times) in order to obtain gratings with the high diffraction efficiency. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Recording the high efficient diffraction gratings by using He-Cd laser Article published earlier |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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DSpace DC |
| title |
Recording the high efficient diffraction gratings by using He-Cd laser |
| spellingShingle |
Recording the high efficient diffraction gratings by using He-Cd laser Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. |
| title_short |
Recording the high efficient diffraction gratings by using He-Cd laser |
| title_full |
Recording the high efficient diffraction gratings by using He-Cd laser |
| title_fullStr |
Recording the high efficient diffraction gratings by using He-Cd laser |
| title_full_unstemmed |
Recording the high efficient diffraction gratings by using He-Cd laser |
| title_sort |
recording the high efficient diffraction gratings by using he-cd laser |
| author |
Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. |
| author_facet |
Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. |
| publishDate |
2004 |
| language |
English |
| container_title |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| format |
Article |
| description |
High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy revealed that As₄₀S₆₀–хSeх resists allows one to record grating originals with profiles of various heights depending on the resist chemical composition, its etching and exposure times. We obtained typical spectral and angular dependences of the first order diffraction efficiency for the grating with the high modulation depth and groove profile close to the sinusoidal one. Comparing the recorded gratings with different spatial frequencies, exposure and etching times, we determined optimal recording conditions (exposure and etching times) in order to obtain gratings with the high diffraction efficiency.
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| issn |
1560-8034 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/119231 |
| citation_txt |
Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ. |
| work_keys_str_mv |
AT kostyukevychsa recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT morozovskaan recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT minkovi recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT shepeliavyipe recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT kudryavtsevaa recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT rubishvm recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT rubishvv recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT tverdokhlebiv recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT kostiukevychas recordingthehighefficientdiffractiongratingsbyusinghecdlaser AT dyrdasv recordingthehighefficientdiffractiongratingsbyusinghecdlaser |
| first_indexed |
2025-11-30T09:09:40Z |
| last_indexed |
2025-11-30T09:09:40Z |
| _version_ |
1850857044833206272 |