Recording the high efficient diffraction gratings by using He-Cd laser
High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy reve...
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| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Дата: | 2004 |
| Автори: | , , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2004
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/119231 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862627762980782080 |
|---|---|
| author | Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. |
| author_facet | Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. |
| citation_txt | Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy revealed that As₄₀S₆₀–хSeх resists allows one to record grating originals with profiles of various heights depending on the resist chemical composition, its etching and exposure times. We obtained typical spectral and angular dependences of the first order diffraction efficiency for the grating with the high modulation depth and groove profile close to the sinusoidal one. Comparing the recorded gratings with different spatial frequencies, exposure and etching times, we determined optimal recording conditions (exposure and etching times) in order to obtain gratings with the high diffraction efficiency.
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| first_indexed | 2025-11-30T09:09:40Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-119231 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-30T09:09:40Z |
| publishDate | 2004 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. 2017-06-05T14:34:32Z 2017-06-05T14:34:32Z 2004 Recording the high efficient diffraction gratings by using He-Cd laser / S.A. Kostyukevych, A.N. Morozovska, V.I. Minko, P.E. Shepeliavyi, A.A. Kudryavtsev, V.M. Rubish, V.V. Rubish, I.V. Tverdokhleb, A.S. Kostiukevych, S.V. Dyrda // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 4. — С. 446-451. — Бібліогр.: 14 назв. — англ. 1560-8034 PACS:42.40.Eq, 42.70.Ln https://nasplib.isofts.kiev.ua/handle/123456789/119231 High efficient holographic diffraction gratings with spatial frequencies from 600 to 3600 mm⁻¹ have been recorded using As₄₀S₆₀–хSeх (х = 0, 10, 20) photoresist layers and He-Cd laser operating at the wavelength λ = 440 nm. The investigation of the grating relief made by atomic force microscopy revealed that As₄₀S₆₀–хSeх resists allows one to record grating originals with profiles of various heights depending on the resist chemical composition, its etching and exposure times. We obtained typical spectral and angular dependences of the first order diffraction efficiency for the grating with the high modulation depth and groove profile close to the sinusoidal one. Comparing the recorded gratings with different spatial frequencies, exposure and etching times, we determined optimal recording conditions (exposure and etching times) in order to obtain gratings with the high diffraction efficiency. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Recording the high efficient diffraction gratings by using He-Cd laser Article published earlier |
| spellingShingle | Recording the high efficient diffraction gratings by using He-Cd laser Kostyukevych, S.A. Morozovska, A.N. Minko, V.I. Shepeliavyi, P.E. Kudryavtsev, A.A. Rubish, V.M. Rubish, V.V. Tverdokhleb, I.V. Kostiukevych, A.S. Dyrda, S.V. |
| title | Recording the high efficient diffraction gratings by using He-Cd laser |
| title_full | Recording the high efficient diffraction gratings by using He-Cd laser |
| title_fullStr | Recording the high efficient diffraction gratings by using He-Cd laser |
| title_full_unstemmed | Recording the high efficient diffraction gratings by using He-Cd laser |
| title_short | Recording the high efficient diffraction gratings by using He-Cd laser |
| title_sort | recording the high efficient diffraction gratings by using he-cd laser |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/119231 |
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