APA (7th ed.) Citation

Litovchenko, V., Efremov, A., Evtukh, A., Rassamakin, Y., Klyui, M., & Kostylov, V. (2001). Increase of planar homogeneity of multi-silicon structures by gettering treatments. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Litovchenko, V.G, A.A Efremov, A.A Evtukh, Yu.V Rassamakin, M.I Klyui, and V.P Kostylov. "Increase of Planar Homogeneity of Multi-silicon Structures by Gettering Treatments." Semiconductor Physics Quantum Electronics & Optoelectronics 2001.

MLA (8th ed.) Citation

Litovchenko, V.G, et al. "Increase of Planar Homogeneity of Multi-silicon Structures by Gettering Treatments." Semiconductor Physics Quantum Electronics & Optoelectronics, 2001.

Warning: These citations may not always be 100% accurate.