Boltovets, N., Voitsikhovskyi, D., Konakova, R., Milenin, V., Makara, V., Rudenko, O., & Mel’nichenko, M. (2001). Comprehensive studies of defect production and strained states in silicon epitaxial layers and device structures based on them. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Boltovets, N.S, D.I Voitsikhovskyi, R.V Konakova, V.V Milenin, V.A Makara, O.V Rudenko, und M.M Mel’nichenko. "Comprehensive Studies of Defect Production and Strained States in Silicon Epitaxial Layers and Device Structures Based on Them." Semiconductor Physics Quantum Electronics & Optoelectronics 2001.
MLA-Zitierstil (8. Ausg.)Boltovets, N.S, et al. "Comprehensive Studies of Defect Production and Strained States in Silicon Epitaxial Layers and Device Structures Based on Them." Semiconductor Physics Quantum Electronics & Optoelectronics, 2001.