APA (7th ed.) Citation

Boltovets, N., Voitsikhovskyi, D., Konakova, R., Milenin, V., Makara, V., Rudenko, O., & Mel’nichenko, M. (2001). Comprehensive studies of defect production and strained states in silicon epitaxial layers and device structures based on them. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Boltovets, N.S, D.I Voitsikhovskyi, R.V Konakova, V.V Milenin, V.A Makara, O.V Rudenko, and M.M Mel’nichenko. "Comprehensive Studies of Defect Production and Strained States in Silicon Epitaxial Layers and Device Structures Based on Them." Semiconductor Physics Quantum Electronics & Optoelectronics 2001.

MLA (8th ed.) Citation

Boltovets, N.S, et al. "Comprehensive Studies of Defect Production and Strained States in Silicon Epitaxial Layers and Device Structures Based on Them." Semiconductor Physics Quantum Electronics & Optoelectronics, 2001.

Warning: These citations may not always be 100% accurate.