The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating
In the work a complex analysis of the influence of size of components and heating temperature upon stresses and defect formation in substrates of the Si-SiO₂ structures is done. It is determined that alteration of shape and size of components can change stresses in the silicon substrate by an order,...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Datum: | 2001 |
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2001
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/119334 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating / O.A. Agueev, A.M. Svetlichny // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 4. — С. 307-312. — Бібліогр.: 15 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862612103795310592 |
|---|---|
| author | Agueev, O.A. Svetlichny, A.M. |
| author_facet | Agueev, O.A. Svetlichny, A.M. |
| citation_txt | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating / O.A. Agueev, A.M. Svetlichny // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 4. — С. 307-312. — Бібліогр.: 15 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | In the work a complex analysis of the influence of size of components and heating temperature upon stresses and defect formation in substrates of the Si-SiO₂ structures is done. It is determined that alteration of shape and size of components can change stresses in the silicon substrate by an order, and the increase in heating temperature from 800 to 1100 °C increases the defect formation criterion by two orders. The optimum size and shape alteration range as well as the heating temperature for defect-free thermal treatment of structures are determined.
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| first_indexed | 2025-11-29T03:30:04Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-119334 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-29T03:30:04Z |
| publishDate | 2001 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Agueev, O.A. Svetlichny, A.M. 2017-06-06T13:18:24Z 2017-06-06T13:18:24Z 2001 The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating / O.A. Agueev, A.M. Svetlichny // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 4. — С. 307-312. — Бібліогр.: 15 назв. — англ. 1560-8034 PACS: 61.72 H, 73.40 Q https://nasplib.isofts.kiev.ua/handle/123456789/119334 In the work a complex analysis of the influence of size of components and heating temperature upon stresses and defect formation in substrates of the Si-SiO₂ structures is done. It is determined that alteration of shape and size of components can change stresses in the silicon substrate by an order, and the increase in heating temperature from 800 to 1100 °C increases the defect formation criterion by two orders. The optimum size and shape alteration range as well as the heating temperature for defect-free thermal treatment of structures are determined. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating Article published earlier |
| spellingShingle | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating Agueev, O.A. Svetlichny, A.M. |
| title | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating |
| title_full | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating |
| title_fullStr | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating |
| title_full_unstemmed | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating |
| title_short | The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating |
| title_sort | influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/119334 |
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