Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates
A Kossel chamber for reflected-beam X-ray studying of single crystal surfaces has been developed on the basis of a BS-340 scanning electron microscope. We have examined the structure of a disturbed layer of silicon plates after chemico-mechanical polishing. The intensity of X-ray reflection from the...
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| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Дата: | 2002 |
| Автор: | |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2002
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/119563 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates / V.N. Tkach // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 1. — С. 36-38. — Бібліогр.: 6 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862730129792303104 |
|---|---|
| author | Tkach, V.N. |
| author_facet | Tkach, V.N. |
| citation_txt | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates / V.N. Tkach // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 1. — С. 36-38. — Бібліогр.: 6 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | A Kossel chamber for reflected-beam X-ray studying of single crystal surfaces has been developed on the basis of a BS-340 scanning electron microscope. We have examined the structure of a disturbed layer of silicon plates after chemico-mechanical polishing. The intensity of X-ray reflection from the lattice planes intersecting a polished surface of a plate characterizes the perfection degree of the disturbed layer, is of a periodic nature and exhibits a tendency to damp deep within the plate.
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| first_indexed | 2025-12-07T19:18:50Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-119563 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-07T19:18:50Z |
| publishDate | 2002 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Tkach, V.N. 2017-06-07T12:24:52Z 2017-06-07T12:24:52Z 2002 Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates / V.N. Tkach // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 1. — С. 36-38. — Бібліогр.: 6 назв. — англ. 1560-8034 PACS: 61.10.N, 61.66, 68.35.B https://nasplib.isofts.kiev.ua/handle/123456789/119563 A Kossel chamber for reflected-beam X-ray studying of single crystal surfaces has been developed on the basis of a BS-340 scanning electron microscope. We have examined the structure of a disturbed layer of silicon plates after chemico-mechanical polishing. The intensity of X-ray reflection from the lattice planes intersecting a polished surface of a plate characterizes the perfection degree of the disturbed layer, is of a periodic nature and exhibits a tendency to damp deep within the plate. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates Article published earlier |
| spellingShingle | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates Tkach, V.N. |
| title | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_full | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_fullStr | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_full_unstemmed | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_short | Divergent-beam X-ray structural studies of a disturbed surface layer in silicon plates |
| title_sort | divergent-beam x-ray structural studies of a disturbed surface layer in silicon plates |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/119563 |
| work_keys_str_mv | AT tkachvn divergentbeamxraystructuralstudiesofadisturbedsurfacelayerinsiliconplates |