Optoelectronic sensor of longitudinal and angular displacements

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 1999
• Main Authors: Dlugaszek, A., Jabczynski, J., Janucki, J., Skrzeczanowski, W.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 1999
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/119869
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Optoelectronic sensor of longitudinal and angular displacements / A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 71-73. — Бібліогр.: 5 назв. — англ.

In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving he...