Properties of SiGe/Si heterostructures fabricated by ion implantation technique
A comprehensive electrical characterisation of the SiGe/Si heterostructures has been performed in the wide temperature range (10270 K). Four structures fabricated by the Ge⁺ ion implantation technique at different substrate temperatures (room temperature, 150°C, 450°C and 600°C) have been studied. T...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Date: | 1999 |
| Main Authors: | , , , , , , , |
| Format: | Article |
| Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1999
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/119871 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Properties of SiGe/Si heterostructures fabricated by ion implantation technique / Y.V. Gomeniuk, V.S. Lysenko, I.N. Osiyuk, I.P. Tyagulski, M.Ya. Valakh, V.A. Yukhimchuk, M. Willander, C.J. Patel // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 74-80. — Бібліогр.: 16 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862722487435919360 |
|---|---|
| author | Gomeniuk, Y.V. Lysenko, V.S. Osiyuk, I.N. Tyagulski, I.P. Valakh, M.Ya. Yukhimchuk, V.A. Willander, M. Patel, C.J. |
| author_facet | Gomeniuk, Y.V. Lysenko, V.S. Osiyuk, I.N. Tyagulski, I.P. Valakh, M.Ya. Yukhimchuk, V.A. Willander, M. Patel, C.J. |
| citation_txt | Properties of SiGe/Si heterostructures fabricated by ion implantation technique / Y.V. Gomeniuk, V.S. Lysenko, I.N. Osiyuk, I.P. Tyagulski, M.Ya. Valakh, V.A. Yukhimchuk, M. Willander, C.J. Patel // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 74-80. — Бібліогр.: 16 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | A comprehensive electrical characterisation of the SiGe/Si heterostructures has been performed in the wide temperature range (10270 K). Four structures fabricated by the Ge⁺ ion implantation technique at different substrate temperatures (room temperature, 150°C, 450°C and 600°C) have been studied. The diode I-V characteristics, thermally stimulated capacitance and currents were measured and the presence and parameters of shallow trap levels were determined in dependence on the substrate temperature. The sample implanted at 450°C shows the best diode operation reflecting the higher quality of the surface silicon layer as compared to RT- and 150°C-implanted samples. Implantation-induced mechanical stresses have been investigated by Raman spectroscopy. For the first time the cryogenic TSCR technique has been applied to this system which makes it possible to investigate strain in the silicon layer due to SiGe layer formation.
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| first_indexed | 2025-12-07T18:36:34Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-119871 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-07T18:36:34Z |
| publishDate | 1999 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Gomeniuk, Y.V. Lysenko, V.S. Osiyuk, I.N. Tyagulski, I.P. Valakh, M.Ya. Yukhimchuk, V.A. Willander, M. Patel, C.J. 2017-06-10T08:05:19Z 2017-06-10T08:05:19Z 1999 Properties of SiGe/Si heterostructures fabricated by ion implantation technique / Y.V. Gomeniuk, V.S. Lysenko, I.N. Osiyuk, I.P. Tyagulski, M.Ya. Valakh, V.A. Yukhimchuk, M. Willander, C.J. Patel // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 3. — С. 74-80. — Бібліогр.: 16 назв. — англ. 1560-8034 PACS: 73.20.Hb; 73.40.Lq; 78.30.-j https://nasplib.isofts.kiev.ua/handle/123456789/119871 A comprehensive electrical characterisation of the SiGe/Si heterostructures has been performed in the wide temperature range (10270 K). Four structures fabricated by the Ge⁺ ion implantation technique at different substrate temperatures (room temperature, 150°C, 450°C and 600°C) have been studied. The diode I-V characteristics, thermally stimulated capacitance and currents were measured and the presence and parameters of shallow trap levels were determined in dependence on the substrate temperature. The sample implanted at 450°C shows the best diode operation reflecting the higher quality of the surface silicon layer as compared to RT- and 150°C-implanted samples. Implantation-induced mechanical stresses have been investigated by Raman spectroscopy. For the first time the cryogenic TSCR technique has been applied to this system which makes it possible to investigate strain in the silicon layer due to SiGe layer formation. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Properties of SiGe/Si heterostructures fabricated by ion implantation technique Article published earlier |
| spellingShingle | Properties of SiGe/Si heterostructures fabricated by ion implantation technique Gomeniuk, Y.V. Lysenko, V.S. Osiyuk, I.N. Tyagulski, I.P. Valakh, M.Ya. Yukhimchuk, V.A. Willander, M. Patel, C.J. |
| title | Properties of SiGe/Si heterostructures fabricated by ion implantation technique |
| title_full | Properties of SiGe/Si heterostructures fabricated by ion implantation technique |
| title_fullStr | Properties of SiGe/Si heterostructures fabricated by ion implantation technique |
| title_full_unstemmed | Properties of SiGe/Si heterostructures fabricated by ion implantation technique |
| title_short | Properties of SiGe/Si heterostructures fabricated by ion implantation technique |
| title_sort | properties of sige/si heterostructures fabricated by ion implantation technique |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/119871 |
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