Melnik, V., Popov, V., Kruger, D., & Oberemok, O. (1999). AES and XPS characterization of TiN layers formed and modified by ion implantation. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago Style (17th ed.) CitationMelnik, V., V. Popov, D. Kruger, and O. Oberemok. "AES and XPS Characterization of TiN Layers Formed and Modified by Ion Implantation." Semiconductor Physics Quantum Electronics & Optoelectronics 1999.
MLA (8th ed.) CitationMelnik, V., et al. "AES and XPS Characterization of TiN Layers Formed and Modified by Ion Implantation." Semiconductor Physics Quantum Electronics & Optoelectronics, 1999.
Warning: These citations may not always be 100% accurate.