Melnik, V., Popov, V., Kruger, D., & Oberemok, O. (1999). AES and XPS characterization of TiN layers formed and modified by ion implantation. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Melnik, V., V. Popov, D. Kruger, und O. Oberemok. "AES and XPS Characterization of TiN Layers Formed and Modified by Ion Implantation." Semiconductor Physics Quantum Electronics & Optoelectronics 1999.
MLA-Zitierstil (8. Ausg.)Melnik, V., et al. "AES and XPS Characterization of TiN Layers Formed and Modified by Ion Implantation." Semiconductor Physics Quantum Electronics & Optoelectronics, 1999.
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