Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire
Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up...
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| Veröffentlicht in: | Functional Materials |
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| Datum: | 2013 |
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| Format: | Artikel |
| Sprache: | English |
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НТК «Інститут монокристалів» НАН України
2013
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/120073 |
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| Zitieren: | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. 2017-06-11T05:45:05Z 2017-06-11T05:45:05Z 2013 Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ. 1027-5495 DOI: dx.doi.org/10.15407/fm20.02.253 https://nasplib.isofts.kiev.ua/handle/123456789/120073 Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up to 1 nm. The morphology and element composition of AlN/sapphire surface at layer-by-layer removal of the nitridated layer were studied by the methods of atomic force microscopy and X-ray photoelectronic spectroscopy. en НТК «Інститут монокристалів» НАН України Functional Materials Technology Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| spellingShingle |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. Technology |
| title_short |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_full |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_fullStr |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_full_unstemmed |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_sort |
polishing of aln/sapphire substrates obtained by thermochemical nitridation of sapphire |
| author |
Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. |
| author_facet |
Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. |
| topic |
Technology |
| topic_facet |
Technology |
| publishDate |
2013 |
| language |
English |
| container_title |
Functional Materials |
| publisher |
НТК «Інститут монокристалів» НАН України |
| format |
Article |
| description |
Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up to 1 nm. The morphology and element composition of AlN/sapphire surface at layer-by-layer removal of the nitridated layer were studied by the methods of atomic force microscopy and X-ray photoelectronic spectroscopy.
|
| issn |
1027-5495 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/120073 |
| citation_txt |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ. |
| work_keys_str_mv |
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| first_indexed |
2025-12-07T17:02:41Z |
| last_indexed |
2025-12-07T17:02:41Z |
| _version_ |
1850869769077522432 |