Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire
Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up...
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| Опубліковано в: : | Functional Materials |
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| Дата: | 2013 |
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2013
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| Теми: | |
| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/120073 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. 
 Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862706927665938432 |
|---|---|
| author | Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. |
| author_facet | Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. |
| citation_txt | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. 
 Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| description | Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up to 1 nm. The morphology and element composition of AlN/sapphire surface at layer-by-layer removal of the nitridated layer were studied by the methods of atomic force microscopy and X-ray photoelectronic spectroscopy.
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| first_indexed | 2025-12-07T17:02:41Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-120073 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-12-07T17:02:41Z |
| publishDate | 2013 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. 2017-06-11T05:45:05Z 2017-06-11T05:45:05Z 2013 Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. 
 Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ. 1027-5495 DOI: dx.doi.org/10.15407/fm20.02.253 https://nasplib.isofts.kiev.ua/handle/123456789/120073 Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up to 1 nm. The morphology and element composition of AlN/sapphire surface at layer-by-layer removal of the nitridated layer were studied by the methods of atomic force microscopy and X-ray photoelectronic spectroscopy. en НТК «Інститут монокристалів» НАН України Functional Materials Technology Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire Article published earlier |
| spellingShingle | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire Vovk, E.A. Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. Technology |
| title | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_full | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_fullStr | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_full_unstemmed | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_short | Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire |
| title_sort | polishing of aln/sapphire substrates obtained by thermochemical nitridation of sapphire |
| topic | Technology |
| topic_facet | Technology |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/120073 |
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