Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire

• Published in: Functional Materials
• Date: 2013
• Main Authors: Vovk, E.A., Budnikov, A.T., Nizhankovskyi, S.V., Kryvonogov, S.I., Krukhmalev, A.A., Dobrotvorskaya, M.V.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2013
• Subjects: Technology
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/120073
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ.

Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up...