Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions

The process of chemical treatment of undoped and doped ZnSe crystals surfaces by bromine emerging solutions has been investigated. The depending of dissolution rate on the etchants composition, their mixing and temperature has been studied. Concentration bounds of polishing solutions have been dete...

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Published in:Functional Materials
Date:2013
Main Authors: Kravtsova, A.S., Tomashyk, V.M., Tomashyk, Z.F., Stratiychuk, I.B., Kuryk, A.O., Kalytchuk, S.M., Galkin, S.M.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2013
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/120087
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions / A.S. Kravtsova, V.M. Tomashyk, Z.F. Tomashyk, I.B. Stratiychuk, A.O. Kuryk, S.M. Kalytchuk, S.M. Galkin // Functional Materials. — 2013. — Т. 20, № 3. — С. 321-328. — Бібліогр.: 15 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-120087
record_format dspace
spelling Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
2017-06-11T06:09:40Z
2017-06-11T06:09:40Z
2013
Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions / A.S. Kravtsova, V.M. Tomashyk, Z.F. Tomashyk, I.B. Stratiychuk, A.O. Kuryk, S.M. Kalytchuk, S.M. Galkin // Functional Materials. — 2013. — Т. 20, № 3. — С. 321-328. — Бібліогр.: 15 назв. — англ.
1027-5495
DOI: dx.doi.org/10.15407/fm20.03.321
https://nasplib.isofts.kiev.ua/handle/123456789/120087
The process of chemical treatment of undoped and doped ZnSe crystals surfaces by bromine emerging solutions has been investigated. The depending of dissolution rate on the etchants composition, their mixing and temperature has been studied. Concentration bounds of polishing solutions have been determined. The surface state after chemical etching has been established using electron microscopy and low temperature photoluminescence. The etchants compositions for semiconductors chemical polishing have been optimized. The comparative characteristics of two etching compositions H₂O₂—HBr —ethylene glycol and H₂O₂—HBr —oxalic acid have been shown to obtain high-quality polished surface of zinc selenide.
en
НТК «Інститут монокристалів» НАН України
Functional Materials
Characterization and properties
Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
spellingShingle Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
Characterization and properties
title_short Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_full Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_fullStr Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_full_unstemmed Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_sort peculiarities of znse dissolution in h₂o₂—hbr -ethylene glycol (oxalic acid) etchant compositions
author Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
author_facet Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
topic Characterization and properties
topic_facet Characterization and properties
publishDate 2013
language English
container_title Functional Materials
publisher НТК «Інститут монокристалів» НАН України
format Article
description The process of chemical treatment of undoped and doped ZnSe crystals surfaces by bromine emerging solutions has been investigated. The depending of dissolution rate on the etchants composition, their mixing and temperature has been studied. Concentration bounds of polishing solutions have been determined. The surface state after chemical etching has been established using electron microscopy and low temperature photoluminescence. The etchants compositions for semiconductors chemical polishing have been optimized. The comparative characteristics of two etching compositions H₂O₂—HBr —ethylene glycol and H₂O₂—HBr —oxalic acid have been shown to obtain high-quality polished surface of zinc selenide.
issn 1027-5495
url https://nasplib.isofts.kiev.ua/handle/123456789/120087
citation_txt Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions / A.S. Kravtsova, V.M. Tomashyk, Z.F. Tomashyk, I.B. Stratiychuk, A.O. Kuryk, S.M. Kalytchuk, S.M. Galkin // Functional Materials. — 2013. — Т. 20, № 3. — С. 321-328. — Бібліогр.: 15 назв. — англ.
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first_indexed 2025-12-07T15:41:55Z
last_indexed 2025-12-07T15:41:55Z
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