Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions

The process of chemical treatment of undoped and doped ZnSe crystals surfaces by bromine emerging solutions has been investigated. The depending of dissolution rate on the etchants composition, their mixing and temperature has been studied. Concentration bounds of polishing solutions have been dete...

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Veröffentlicht in:Functional Materials
Datum:2013
Hauptverfasser: Kravtsova, A.S., Tomashyk, V.M., Tomashyk, Z.F., Stratiychuk, I.B., Kuryk, A.O., Kalytchuk, S.M., Galkin, S.M.
Format: Artikel
Sprache:Englisch
Veröffentlicht: НТК «Інститут монокристалів» НАН України 2013
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Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/120087
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Zitieren:Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions / A.S. Kravtsova, V.M. Tomashyk, Z.F. Tomashyk, I.B. Stratiychuk, A.O. Kuryk, S.M. Kalytchuk, S.M. Galkin // Functional Materials. — 2013. — Т. 20, № 3. — С. 321-328. — Бібліогр.: 15 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
author_facet Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
citation_txt Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions / A.S. Kravtsova, V.M. Tomashyk, Z.F. Tomashyk, I.B. Stratiychuk, A.O. Kuryk, S.M. Kalytchuk, S.M. Galkin // Functional Materials. — 2013. — Т. 20, № 3. — С. 321-328. — Бібліогр.: 15 назв. — англ.
collection DSpace DC
container_title Functional Materials
description The process of chemical treatment of undoped and doped ZnSe crystals surfaces by bromine emerging solutions has been investigated. The depending of dissolution rate on the etchants composition, their mixing and temperature has been studied. Concentration bounds of polishing solutions have been determined. The surface state after chemical etching has been established using electron microscopy and low temperature photoluminescence. The etchants compositions for semiconductors chemical polishing have been optimized. The comparative characteristics of two etching compositions H₂O₂—HBr —ethylene glycol and H₂O₂—HBr —oxalic acid have been shown to obtain high-quality polished surface of zinc selenide.
first_indexed 2025-12-07T15:41:55Z
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last_indexed 2025-12-07T15:41:55Z
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publisher НТК «Інститут монокристалів» НАН України
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spelling Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
2017-06-11T06:09:40Z
2017-06-11T06:09:40Z
2013
Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions / A.S. Kravtsova, V.M. Tomashyk, Z.F. Tomashyk, I.B. Stratiychuk, A.O. Kuryk, S.M. Kalytchuk, S.M. Galkin // Functional Materials. — 2013. — Т. 20, № 3. — С. 321-328. — Бібліогр.: 15 назв. — англ.
1027-5495
DOI: dx.doi.org/10.15407/fm20.03.321
https://nasplib.isofts.kiev.ua/handle/123456789/120087
The process of chemical treatment of undoped and doped ZnSe crystals surfaces by bromine emerging solutions has been investigated. The depending of dissolution rate on the etchants composition, their mixing and temperature has been studied. Concentration bounds of polishing solutions have been determined. The surface state after chemical etching has been established using electron microscopy and low temperature photoluminescence. The etchants compositions for semiconductors chemical polishing have been optimized. The comparative characteristics of two etching compositions H₂O₂—HBr —ethylene glycol and H₂O₂—HBr —oxalic acid have been shown to obtain high-quality polished surface of zinc selenide.
en
НТК «Інститут монокристалів» НАН України
Functional Materials
Characterization and properties
Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
Article
published earlier
spellingShingle Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
Kravtsova, A.S.
Tomashyk, V.M.
Tomashyk, Z.F.
Stratiychuk, I.B.
Kuryk, A.O.
Kalytchuk, S.M.
Galkin, S.M.
Characterization and properties
title Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_full Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_fullStr Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_full_unstemmed Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_short Peculiarities of ZnSe dissolution in H₂O₂—HBr -ethylene glycol (oxalic acid) etchant compositions
title_sort peculiarities of znse dissolution in h₂o₂—hbr -ethylene glycol (oxalic acid) etchant compositions
topic Characterization and properties
topic_facet Characterization and properties
url https://nasplib.isofts.kiev.ua/handle/123456789/120087
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