Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution

Kinetics of oxygen distribution variation and oxygen clusters (thermodonors) formation is considered and described by a system of nonlinear equations. Analytic solution is obtained for homogeneous nonstationary distribution of oxygen and its complexes. It is shown that due to the interaction of oxyg...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2000
Автор: Selishchev, P.A.
Формат: Стаття
Мова:Англійська
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2000
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/120230
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution / P.A. Selishchev // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 19-21. — Бібліогр.: 10 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Selishchev, P.A.
author_facet Selishchev, P.A.
citation_txt Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution / P.A. Selishchev // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 19-21. — Бібліогр.: 10 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description Kinetics of oxygen distribution variation and oxygen clusters (thermodonors) formation is considered and described by a system of nonlinear equations. Analytic solution is obtained for homogeneous nonstationary distribution of oxygen and its complexes. It is shown that due to the interaction of oxygen interstitials and their complexes the homogeneous state becomes unstable at some conditions, and spatial periodical distribution develops. Its period lies in the range of 10-1000 Å .
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
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language English
last_indexed 2025-12-07T20:07:00Z
publishDate 2000
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Selishchev, P.A.
2017-06-11T13:17:47Z
2017-06-11T13:17:47Z
2000
Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution / P.A. Selishchev // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 19-21. — Бібліогр.: 10 назв. — англ.
1560-8034
PACS: 36.40. M, 61.66, 61.72. T, 68.65
https://nasplib.isofts.kiev.ua/handle/123456789/120230
Kinetics of oxygen distribution variation and oxygen clusters (thermodonors) formation is considered and described by a system of nonlinear equations. Analytic solution is obtained for homogeneous nonstationary distribution of oxygen and its complexes. It is shown that due to the interaction of oxygen interstitials and their complexes the homogeneous state becomes unstable at some conditions, and spatial periodical distribution develops. Its period lies in the range of 10-1000 Å .
The author are grateful to O.A. Leontev for his contributuions to technical providing the work.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
Article
published earlier
spellingShingle Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
Selishchev, P.A.
title Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
title_full Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
title_fullStr Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
title_full_unstemmed Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
title_short Accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
title_sort accumulation dynamics of oxygen clusters in silicon and formation of their nonhomogeneous distribution
url https://nasplib.isofts.kiev.ua/handle/123456789/120230
work_keys_str_mv AT selishchevpa accumulationdynamicsofoxygenclustersinsiliconandformationoftheirnonhomogeneousdistribution