Science and technology excimer laser complex and examples of its applications

Science and technology multi-purposes, wide-functional excimer laser complex consisting of two precisely and fine synchronized excimer lasers and assembled on the common optical table and added by high efficient Stimulated Raman Scattering converter and both working by scheme “oscillator — amplifier...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2000
Hauptverfasser: Baschenko, S.M., Blonskiy, I.V.
Format: Artikel
Sprache:English
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2000
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/120241
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Science and technology excimer laser complex and examples of its applications / S.M. Baschenko, I.V. Blonskiy. // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 82-90. — Бібліогр.: 12 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-120241
record_format dspace
spelling Baschenko, S.M.
Blonskiy, I.V.
2017-06-11T13:34:39Z
2017-06-11T13:34:39Z
2000
Science and technology excimer laser complex and examples of its applications / S.M. Baschenko, I.V. Blonskiy. // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 82-90. — Бібліогр.: 12 назв. — англ.
1560-8034
PACS: 39, 42, 78.
https://nasplib.isofts.kiev.ua/handle/123456789/120241
Science and technology multi-purposes, wide-functional excimer laser complex consisting of two precisely and fine synchronized excimer lasers and assembled on the common optical table and added by high efficient Stimulated Raman Scattering converter and both working by scheme “oscillator — amplifier” is created. Due to these the Complex is able to generate highest quality radiation simultaneously at a few wavelengths with its definite intensities ratio. Radiation of this complex has next parameters: main wavelengths of radiation — 193, 222, 248, 308 and 351 nm; radiation pulse duration in the range of 20…30 ns; pulse energy at the main wavelengths — 20–30 mJ; bandwidth of radiation line is less than 0.1 cm⁻¹; divergence of radiation is less than 10⁻⁴ radians; fine and smooth tuning within the part of the respective excimer molecule luminescence band — 0.5–4.0 nm; discrete SRS-conversion (tens lines) — within the region from 180 to 800 nm; efficiency of SRS-conversion in defined SRS-component — up to 30–50%; pulse energy at the additional wavelength in dependence on number of emitted components is about 1–10 mJ; repetition rate — up to 50 pps. Highest quality of complex's radiation (spectral brightness up to 10¹² W/nm·steradian) provides its widest application prospects and allows one to achieve in focal spot power density up to 10¹³⁻¹⁴ W/cm². Three examples of complex application, namely: for remote sensing of atmosphere, high-precision processing of super-hard non-metallic materials and for porous-silicon luminescence properties modification are reported.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Science and technology excimer laser complex and examples of its applications
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Science and technology excimer laser complex and examples of its applications
spellingShingle Science and technology excimer laser complex and examples of its applications
Baschenko, S.M.
Blonskiy, I.V.
title_short Science and technology excimer laser complex and examples of its applications
title_full Science and technology excimer laser complex and examples of its applications
title_fullStr Science and technology excimer laser complex and examples of its applications
title_full_unstemmed Science and technology excimer laser complex and examples of its applications
title_sort science and technology excimer laser complex and examples of its applications
author Baschenko, S.M.
Blonskiy, I.V.
author_facet Baschenko, S.M.
Blonskiy, I.V.
publishDate 2000
language English
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
format Article
description Science and technology multi-purposes, wide-functional excimer laser complex consisting of two precisely and fine synchronized excimer lasers and assembled on the common optical table and added by high efficient Stimulated Raman Scattering converter and both working by scheme “oscillator — amplifier” is created. Due to these the Complex is able to generate highest quality radiation simultaneously at a few wavelengths with its definite intensities ratio. Radiation of this complex has next parameters: main wavelengths of radiation — 193, 222, 248, 308 and 351 nm; radiation pulse duration in the range of 20…30 ns; pulse energy at the main wavelengths — 20–30 mJ; bandwidth of radiation line is less than 0.1 cm⁻¹; divergence of radiation is less than 10⁻⁴ radians; fine and smooth tuning within the part of the respective excimer molecule luminescence band — 0.5–4.0 nm; discrete SRS-conversion (tens lines) — within the region from 180 to 800 nm; efficiency of SRS-conversion in defined SRS-component — up to 30–50%; pulse energy at the additional wavelength in dependence on number of emitted components is about 1–10 mJ; repetition rate — up to 50 pps. Highest quality of complex's radiation (spectral brightness up to 10¹² W/nm·steradian) provides its widest application prospects and allows one to achieve in focal spot power density up to 10¹³⁻¹⁴ W/cm². Three examples of complex application, namely: for remote sensing of atmosphere, high-precision processing of super-hard non-metallic materials and for porous-silicon luminescence properties modification are reported.
issn 1560-8034
url https://nasplib.isofts.kiev.ua/handle/123456789/120241
citation_txt Science and technology excimer laser complex and examples of its applications / S.M. Baschenko, I.V. Blonskiy. // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 1. — С. 82-90. — Бібліогр.: 12 назв. — англ.
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