APA (7th ed.) Citation

Holiney, R., Matveeva, L., & Venger, E. (1999). Investigation of the undersurface damaged layers in silicon wafers. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Holiney, R.Yu, L.A Matveeva, and E.F Venger. "Investigation of the Undersurface Damaged Layers in Silicon Wafers." Semiconductor Physics Quantum Electronics & Optoelectronics 1999.

MLA (8th ed.) Citation

Holiney, R.Yu, et al. "Investigation of the Undersurface Damaged Layers in Silicon Wafers." Semiconductor Physics Quantum Electronics & Optoelectronics, 1999.

Warning: These citations may not always be 100% accurate.