Chemical dissolution of indium arsenide in the Br₂-HBr solutions
The nature and kinetics of InAs chemical dissolution and chemical cutting, in the bromine solutions in hydrobromic acid have been investigated. It was shown that at low (up to 6 vol.%) bromine concentrations the InAs dissolution rate grows linearly with bromine concentration. Such solutions may be u...
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| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Дата: | 1999 |
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
1999
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/120255 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Chemical dissolution of indium arsenide in the Br₂-HBr solutions / Z.F. Tomashik, S.G. Danylenko, V.N. Tomashik, M.Yu. Kravetski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 4. — С. 73-75. — Бібліогр.: 10 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862634719520227328 |
|---|---|
| author | Tomashik, Z.F. Danylenko, S.G. Tomashik, V.N. Kravetski, M.Yu. |
| author_facet | Tomashik, Z.F. Danylenko, S.G. Tomashik, V.N. Kravetski, M.Yu. |
| citation_txt | Chemical dissolution of indium arsenide in the Br₂-HBr solutions / Z.F. Tomashik, S.G. Danylenko, V.N. Tomashik, M.Yu. Kravetski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 4. — С. 73-75. — Бібліогр.: 10 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | The nature and kinetics of InAs chemical dissolution and chemical cutting, in the bromine solutions in hydrobromic acid have been investigated. It was shown that at low (up to 6 vol.%) bromine concentrations the InAs dissolution rate grows linearly with bromine concentration. Such solutions may be used to chemically polish InAs. Solutions containing from 20 to 30 vol.% Br₂ in HBr dissolve InAs with the rate 25 to 50 µ/min forming polished surfaces with etch pits. Such solutions may be used to chemically cut indium arsenide.
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| first_indexed | 2025-11-30T16:34:04Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-120255 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-30T16:34:04Z |
| publishDate | 1999 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Tomashik, Z.F. Danylenko, S.G. Tomashik, V.N. Kravetski, M.Yu. 2017-06-11T14:07:54Z 2017-06-11T14:07:54Z 1999 Chemical dissolution of indium arsenide in the Br₂-HBr solutions / Z.F. Tomashik, S.G. Danylenko, V.N. Tomashik, M.Yu. Kravetski // Semiconductor Physics Quantum Electronics & Optoelectronics. — 1999. — Т. 2, № 4. — С. 73-75. — Бібліогр.: 10 назв. — англ. 1560-8034 PACS 81,65 C. https://nasplib.isofts.kiev.ua/handle/123456789/120255 The nature and kinetics of InAs chemical dissolution and chemical cutting, in the bromine solutions in hydrobromic acid have been investigated. It was shown that at low (up to 6 vol.%) bromine concentrations the InAs dissolution rate grows linearly with bromine concentration. Such solutions may be used to chemically polish InAs. Solutions containing from 20 to 30 vol.% Br₂ in HBr dissolve InAs with the rate 25 to 50 µ/min forming polished surfaces with etch pits. Such solutions may be used to chemically cut indium arsenide. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Chemical dissolution of indium arsenide in the Br₂-HBr solutions Article published earlier |
| spellingShingle | Chemical dissolution of indium arsenide in the Br₂-HBr solutions Tomashik, Z.F. Danylenko, S.G. Tomashik, V.N. Kravetski, M.Yu. |
| title | Chemical dissolution of indium arsenide in the Br₂-HBr solutions |
| title_full | Chemical dissolution of indium arsenide in the Br₂-HBr solutions |
| title_fullStr | Chemical dissolution of indium arsenide in the Br₂-HBr solutions |
| title_full_unstemmed | Chemical dissolution of indium arsenide in the Br₂-HBr solutions |
| title_short | Chemical dissolution of indium arsenide in the Br₂-HBr solutions |
| title_sort | chemical dissolution of indium arsenide in the br₂-hbr solutions |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/120255 |
| work_keys_str_mv | AT tomashikzf chemicaldissolutionofindiumarsenideinthebr2hbrsolutions AT danylenkosg chemicaldissolutionofindiumarsenideinthebr2hbrsolutions AT tomashikvn chemicaldissolutionofindiumarsenideinthebr2hbrsolutions AT kravetskimyu chemicaldissolutionofindiumarsenideinthebr2hbrsolutions |