Investigation of damaged layer formed at mechanical treatment of sapphire using three-crystal X-ray diffraction method

• Published in: Functional Materials
• Date: 2014
• Main Authors: Tkachenko, V.F., Kryvonogov, S.I., Budnikov, A.T., Lukienko, O.A., Vovk, E.A.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2014
• Subjects: Characterization and properties
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/120413
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Investigation of damaged layer formed at mechanical treatment of sapphire using three-crystal X-ray diffraction method / V.F. Tkachenko, S.I. Kryvonogov, A.T. Budnikov, O.A. Lukienko, E.A. Vovk // Functional Materials. — 2014. — Т. 21, № 2. — С. 171-175. — Бібліогр.: 17 назв. — англ.

The methods of three-crystal X-ray diffractometry were used for investigating structure perfection in surface-adjacent damaged layer (DL) formed in the process of mechanical and chemical-mechanical treatment of sapphire crystals with the surface orientation {0001} {11-20}. Analysis of the diffraction reflection curves made it possible to establish the structure and character of distortions in the DL. There was established the mean-square disorientation between the fragments, which allowed to characterize the defects structure of the surface-adjacent DL.