Influence of deposition rate and substrate temperature on structure and optical features of NiO thin film

• Published in: Functional Materials
• Date: 2016
• Main Authors: Oberemok, O.S., Sabov, T.M., Lisovskyy, I.P., Khacevych, I.M., Gudymenko, O.Yo., Nikirin, V.A., Voitovych, M.V.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2016
• Subjects: Technology
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/120639
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Influence of deposition rate and substrate temperature on structure and optical features of NiO thin film / O.S. Oberemok, T.M. Sabov, I.P. Lisovskyy, I.M. Khacevych, O.Yo. Gudymenko, V.A. Nikirin, M.V. Voitovych // Functional Materials. — 2016. — Т. 23, № 2. — С. 313-317. — Бібліогр.: 8 назв. — англ.

Nickel oxide thin films were prepared by direct-current magnetron sputtering method at different deposition rates on unheated and heated substrates. It was shown that the deposited films are the dense arrays of nanowhiskers with the rhombohedral crystalline structure for the unheated substrate and w...