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Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification

The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal det...

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Published in:Condensed Matter Physics
Date:2013
Main Authors: Pogrebnjak, A.D., Borisyuk, V.N., Bagdasaryan, A.A.
Format: Article
Language:English
Published: Інститут фізики конденсованих систем НАН України 2013
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/120821
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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